| Presentation | 2000/8/22 SCE2000-12 / MW2000-76 Epitaxial NbN/MgO/NbN Multilayers using Reactive DC-sputtering Technique Akira Kawakami, Zhen Wang, Shigehito Miki, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For THz applications, we have developed a process to grow epitaxial NbN/MgO/NbN trilayers using reactive dc-sputtering technique. NbN films were deposited by reactive dc-sputtering using a Nb target. MgO films are also deposited by reactive dc-sputtering using a Mg target. Between the under-NbN layer and the MgO layer, a thin MgO layer (1.3 nm) was deposited by rf-sputtering as a buffer layer. However, MgO inter-layer thickness was changed up to 240 nm, T_c and 20K-resistivity of NbN top-layers (180 nm) showed no remarkable dependency and they were 15.7 K and about 60 μΩcm. NbN/MgO/NbN SIS junction was also fabricated using the epitaxial technique and it showed high current density (J_c=2.6kA/cm~2), large gap voltage (V_g=5.8mV), and small subgap leakage currents V_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | NbN/MgO/NbN / Epitaxial / Reactive DC-sputtering / Mg target / SIS |
| Paper # | SCE2000-12,MW2000-76 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2000/8/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SCE2000-12 / MW2000-76 Epitaxial NbN/MgO/NbN Multilayers using Reactive DC-sputtering Technique |
| Sub Title (in English) | |
| Keyword(1) | NbN/MgO/NbN |
| Keyword(2) | Epitaxial |
| Keyword(3) | Reactive DC-sputtering |
| Keyword(4) | Mg target |
| Keyword(5) | SIS |
| 1st Author's Name | Akira Kawakami |
| 1st Author's Affiliation | Kansai Advanced Research Center, Communications Research Laboratory() |
| 2nd Author's Name | Zhen Wang |
| 2nd Author's Affiliation | Kansai Advanced Research Center, Communications Research Laboratory |
| 3rd Author's Name | Shigehito Miki |
| 3rd Author's Affiliation | Kobe University |
| Date | 2000/8/22 |
| Paper # | SCE2000-12,MW2000-76 |
| Volume (vol) | vol.100 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |