| Presentation | 1999/7/30 Evaluation of surface resistance of YBCO thin film made by inductive coupled plasma sputtering. Toshiyuki Suzuki, Masanobu Kusunoki, Masashi Mukaida, Shigetoshi Ohshima, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Microwave surface resistance (Rs) of YBa_2Cu_3O_y (YBCO) thin film prepared by inductive coupled plasma sputtering (ICP) was investigated. The Rs was measured by the dielectric resonator method at 22 GHz. The film was deposited on both side of the LaAlO_3 (LAD) substrate. The Rs of the back side film was lower than first side. It indicates that effective substrate temperature during the secound deposition was higher than that of first deposition. The YBCO was deposited also on the BaSnO_3/MgO substrate. The Rs values of the film was 0.38 mΩ at 35 K and 1.13 mΩ at 77 K. The Rs values scaled to 10 GHz were 0.08 mΩ at 35 K and 0.23 mΩ at 77 K, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | inductive coupled plasma sputtering / YBa_2Cu_3O_y / LaAlO_3 / BaSnO_3 / Rs |
| Paper # | SCE99-16 |
| Date of Issue |
| Conference Information | |
| Committee | SCE |
|---|---|
| Conference Date | 1999/7/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of surface resistance of YBCO thin film made by inductive coupled plasma sputtering. |
| Sub Title (in English) | |
| Keyword(1) | inductive coupled plasma sputtering |
| Keyword(2) | YBa_2Cu_3O_y |
| Keyword(3) | LaAlO_3 |
| Keyword(4) | BaSnO_3 |
| Keyword(5) | Rs |
| 1st Author's Name | Toshiyuki Suzuki |
| 1st Author's Affiliation | Faculty of Engineering , Yamagata University() |
| 2nd Author's Name | Masanobu Kusunoki |
| 2nd Author's Affiliation | Faculty of Engineering , Yamagata University |
| 3rd Author's Name | Masashi Mukaida |
| 3rd Author's Affiliation | Faculty of Engineering , Yamagata University |
| 4th Author's Name | Shigetoshi Ohshima |
| 4th Author's Affiliation | Faculty of Engineering , Yamagata University |
| Date | 1999/7/30 |
| Paper # | SCE99-16 |
| Volume (vol) | vol.99 |
| Number (no) | 249 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |