Presentation 1999/7/30
Preparation of high-T_ c-axis oriented EBCO thin films on Si substrates with buffer layers
T. HASHIMOTO, H. MUTO, H. WAKANA, S. KIKUCHI, O. MICHIKAMI,
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Abstract(in English) We investigated some buffer materials and those deposition conditions in order to obtain high-quality c-axis oriented EuBa_2Cu_3O_x (EBCO) films using DC magnetron sputtering. In case of the deposition of CeO_2 and Y_2O_3 on Si(001) substrates, c-axis oriented films have been difficult to grow due to the existence of SiO_x films. Accordingly, YSZ(001) films which are easy to grow on Si(001) substrates were deposited as the first buffer layer, and the second layer of CeO_2 or Y_2O_3 which has a small lattice mismatch with EBCO was grown epitaxially on the YSZ layer. The c-axis oriented EBCO films 1500Å thick with T_'s of about 90K were obtained on YSZ(200Å)\CeO_2(150Å) buffer layers at T_s=600℃ and on YSZ(200Å)\Y_2O_3(300Å) buffer layers at T_s=65O℃. The EBCO films on the YSZ\Y_2O_3 buffer layers were superior to those on the YSZ\CeO_2 buffer layers in crystallinity.
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Keyword(in English) Si substrate / YSZ / CeO_2 / Y_2O_3 / EuBa_2Cu_3O_x film
Paper # SCE99-15
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Conference Information
Committee SCE
Conference Date 1999/7/30(1days)
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Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of high-T_ c-axis oriented EBCO thin films on Si substrates with buffer layers
Sub Title (in English)
Keyword(1) Si substrate
Keyword(2) YSZ
Keyword(3) CeO_2
Keyword(4) Y_2O_3
Keyword(5) EuBa_2Cu_3O_x film
1st Author's Name T. HASHIMOTO
1st Author's Affiliation Faculty of Engineering, Iwate University()
2nd Author's Name H. MUTO
2nd Author's Affiliation Faculty of Engineering, Iwate University
3rd Author's Name H. WAKANA
3rd Author's Affiliation Faculty of Engineering, Iwate University
4th Author's Name S. KIKUCHI
4th Author's Affiliation Faculty of Engineering, Iwate University
5th Author's Name O. MICHIKAMI
5th Author's Affiliation Faculty of Engineering, Iwate University
Date 1999/7/30
Paper # SCE99-15
Volume (vol) vol.99
Number (no) 249
Page pp.pp.-
#Pages 6
Date of Issue