| Presentation | 1993/10/20 Growth and Characterization of Epitaxial SrTiO_3 Thin Films with Prominent Polarizability Mamoru Iwabuchi, Takeshi Ashida, Takeshi Kobayashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Epitaxial SrTiO_3(STO)thin films were grown on(111)Pt, (100)MgO substrate successfully by the rf magnetron sputtering.At present, the dielectric constant of 110-nm-thick STO thin films reached as high as 370ε_0 at room temperature.The polarization of this film r eached the range of 10^14> cm^-2>,which was a significant step toward the application for use for a insulator ofthe superconducting MISFETs and the Si 256 Mbits DRAM.Cr/(100)STO/(111) Pt MIM′structures were prepared and their I-V and C-V properties w ere measured.Taking them into account,some possible band diagram of STO were discussed.Consequently,the band diagram where STO layer included no space-charge was concluded as a much proper one. This result is not only important for better knowledge and application of STO thin films but also essential for the understanding of the superconducting field-effect. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SrTiO_3 / highlydielectric constant / FTIR spectra / rectifying action / Schottky barrier / space-charge-free band model |
| Paper # | SCE93-44 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 1993/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth and Characterization of Epitaxial SrTiO_3 Thin Films with Prominent Polarizability |
| Sub Title (in English) | |
| Keyword(1) | SrTiO_3 |
| Keyword(2) | highlydielectric constant |
| Keyword(3) | FTIR spectra |
| Keyword(4) | rectifying action |
| Keyword(5) | Schottky barrier |
| Keyword(6) | space-charge-free band model |
| 1st Author's Name | Mamoru Iwabuchi |
| 1st Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Science,Osaka University() |
| 2nd Author's Name | Takeshi Ashida |
| 2nd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Science,Osaka University |
| 3rd Author's Name | Takeshi Kobayashi |
| 3rd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Science,Osaka University |
| Date | 1993/10/20 |
| Paper # | SCE93-44 |
| Volume (vol) | vol.93 |
| Number (no) | 279 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |