Presentation 1993/10/20
Fabrication of Nb/AlOx/Nb tunnel junctions for X-ray detector
Hiroshi Nakagawa, Hiroshi Akoh, Masahiro Aoyagi, Itaru Kurosawa, Susumu Takada, Pepe Gianpiero, Luigi Frunzio, Roberto Cristiano, Emanuela Eposit, Sergio Pagano, Giuseppe Peluso, Antonio Barone,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A new fabrication process is presented to make Nb, AlOx/Nb superconducting tunnel junctions for X-ray detection with little subgap leakage current at low temperatures below 4.2 K.A Nb anodization process,in which the Si substrate was used as an anode to flow the anodizing current,has been adopted to make better electric insulation at the all exposed Nb surfaces including step edges of periphery of tunnel barrier and base electrode.The temperature dependence of the subgap current has been significantly improved and is in good agreement with that predicted by the BCS theory,while junctions made by the conventional process showed a large discrepancy of the temperature dependence.It has been clarified that the present fabrication process makes the subgap leakage current small extremely for X-ray detection.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) X-Ray detector / Superconducting tunnel junction / anodization / subgap tunnel current
Paper # SCE93-39
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Conference Information
Committee SCE
Conference Date 1993/10/20(1days)
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Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of Nb/AlOx/Nb tunnel junctions for X-ray detector
Sub Title (in English)
Keyword(1) X-Ray detector
Keyword(2) Superconducting tunnel junction
Keyword(3) anodization
Keyword(4) subgap tunnel current
1st Author's Name Hiroshi Nakagawa
1st Author's Affiliation Electrotechnical Laboratory()
2nd Author's Name Hiroshi Akoh
2nd Author's Affiliation Electrotechnical Laboratory
3rd Author's Name Masahiro Aoyagi
3rd Author's Affiliation Electrotechnical Laboratory
4th Author's Name Itaru Kurosawa
4th Author's Affiliation Electrotechnical Laboratory
5th Author's Name Susumu Takada
5th Author's Affiliation Electrotechnical Laboratory
6th Author's Name Pepe Gianpiero
6th Author's Affiliation Napoli University
7th Author's Name Luigi Frunzio
7th Author's Affiliation Istituto di Cibernetica del C.N.R
8th Author's Name Roberto Cristiano
8th Author's Affiliation Istituto di Cibernetica del C.N.R
9th Author's Name Emanuela Eposit
9th Author's Affiliation Istituto di Cibernetica del C.N.R
10th Author's Name Sergio Pagano
10th Author's Affiliation Istituto di Cibernetica del C.N.R
11th Author's Name Giuseppe Peluso
11th Author's Affiliation Napoli University
12th Author's Name Antonio Barone
12th Author's Affiliation Napoli University
Date 1993/10/20
Paper # SCE93-39
Volume (vol) vol.93
Number (no) 279
Page pp.pp.-
#Pages 6
Date of Issue