Presentation | 1993/10/20 Fabrication of Nb/AlOx/Nb tunnel junctions for X-ray detector Hiroshi Nakagawa, Hiroshi Akoh, Masahiro Aoyagi, Itaru Kurosawa, Susumu Takada, Pepe Gianpiero, Luigi Frunzio, Roberto Cristiano, Emanuela Eposit, Sergio Pagano, Giuseppe Peluso, Antonio Barone, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A new fabrication process is presented to make Nb, AlOx/Nb superconducting tunnel junctions for X-ray detection with little subgap leakage current at low temperatures below 4.2 K.A Nb anodization process,in which the Si substrate was used as an anode to flow the anodizing current,has been adopted to make better electric insulation at the all exposed Nb surfaces including step edges of periphery of tunnel barrier and base electrode.The temperature dependence of the subgap current has been significantly improved and is in good agreement with that predicted by the BCS theory,while junctions made by the conventional process showed a large discrepancy of the temperature dependence.It has been clarified that the present fabrication process makes the subgap leakage current small extremely for X-ray detection. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | X-Ray detector / Superconducting tunnel junction / anodization / subgap tunnel current |
Paper # | SCE93-39 |
Date of Issue |
Conference Information | |
Committee | SCE |
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Conference Date | 1993/10/20(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
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Assistant |
Paper Information | |
Registration To | Superconductive Electronics (SCE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of Nb/AlOx/Nb tunnel junctions for X-ray detector |
Sub Title (in English) | |
Keyword(1) | X-Ray detector |
Keyword(2) | Superconducting tunnel junction |
Keyword(3) | anodization |
Keyword(4) | subgap tunnel current |
1st Author's Name | Hiroshi Nakagawa |
1st Author's Affiliation | Electrotechnical Laboratory() |
2nd Author's Name | Hiroshi Akoh |
2nd Author's Affiliation | Electrotechnical Laboratory |
3rd Author's Name | Masahiro Aoyagi |
3rd Author's Affiliation | Electrotechnical Laboratory |
4th Author's Name | Itaru Kurosawa |
4th Author's Affiliation | Electrotechnical Laboratory |
5th Author's Name | Susumu Takada |
5th Author's Affiliation | Electrotechnical Laboratory |
6th Author's Name | Pepe Gianpiero |
6th Author's Affiliation | Napoli University |
7th Author's Name | Luigi Frunzio |
7th Author's Affiliation | Istituto di Cibernetica del C.N.R |
8th Author's Name | Roberto Cristiano |
8th Author's Affiliation | Istituto di Cibernetica del C.N.R |
9th Author's Name | Emanuela Eposit |
9th Author's Affiliation | Istituto di Cibernetica del C.N.R |
10th Author's Name | Sergio Pagano |
10th Author's Affiliation | Istituto di Cibernetica del C.N.R |
11th Author's Name | Giuseppe Peluso |
11th Author's Affiliation | Napoli University |
12th Author's Name | Antonio Barone |
12th Author's Affiliation | Napoli University |
Date | 1993/10/20 |
Paper # | SCE93-39 |
Volume (vol) | vol.93 |
Number (no) | 279 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |