Presentation 1993/7/26
Fabrication and characteristics of three terminal devices from (Ba, Rb)BiO_3
Tomoyuki Yamada, Fumihiko Toda, Ryodo Kawasaki, Zhonmin Wen, Takehiko Makita, Hitoshi Abe,
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Abstract(in English) We fabricated In, (Ba,Rb)BiO_3/SrTiO_3(Nb)three terminal devices of small sizes by the deposition of metals through metal masks.The devices operated as transistors in common base and common emitter configurations.We also investigated the formation of passivation film and metal film patterns by photolithography,dry etching and lift-off methods.We prepared metal(Al,Cr and Ni)-(Ba,Rb)BiO_3 contacts.Contacts except the Ni one showed rectifyina I-V characteristics.The contacts may be useful as junctions in three terminal device.
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Keyword(in English) Superconducting base transistor / (Ba,Rb)BiO_3 thin film / heterostructure
Paper # SCE93-25
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Committee SCE
Conference Date 1993/7/26(1days)
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Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and characteristics of three terminal devices from (Ba, Rb)BiO_3
Sub Title (in English)
Keyword(1) Superconducting base transistor
Keyword(2) (Ba,Rb)BiO_3 thin film
Keyword(3) heterostructure
1st Author's Name Tomoyuki Yamada
1st Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.()
2nd Author's Name Fumihiko Toda
2nd Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.
3rd Author's Name Ryodo Kawasaki
3rd Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.
4th Author's Name Zhonmin Wen
4th Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.
5th Author's Name Takehiko Makita
5th Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.
6th Author's Name Hitoshi Abe
6th Author's Affiliation Research Laboratory,Oki Electric Industry Co.,Ltd.
Date 1993/7/26
Paper # SCE93-25
Volume (vol) vol.93
Number (no) 166
Page pp.pp.-
#Pages 6
Date of Issue