Presentation 1996/7/24
High frequency properties of YBCO Josephson junctions on Si substrate fabricated by electron beam irradiation
Sangjae Kim, Hiroaki Myoren, Jian Chen, Kensuke Nakajima, Tsutomu Yamashita,
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Abstract(in English) YBa_2Cu_3O_<7-y>(YBCO) film Josephson junctions(JJ) on silicon(Si) substrate were fabricated by focused electron beam irradiation. We used approximately 400Å thick TBCO films on Si substrates with buffer layers of Y_2O_3 and yttria stabilized ZrO_2(YSZ). Microbridges 2~5μm in width and 10μm in length on YBCO films were patterned using the EDTA etchant. The 200KeV electron beam irradiation was performed by STEM to introduce a weak link across the bridge to form a junction. The junctions showed RSJ-like I-V curves and magnetic field modulation of the critical current. Shapiro steps induced by irradiation of 20GHz were observed in dV/dI-V curves up to about 4m V which suggests that the junction can respond up to about 2THz.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) focused electron beam irradiation / YBa_2Cu_3O<7-y> film / Josephson junctions / Si substrate / high frequency response
Paper # SCE96-11
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Conference Information
Committee SCE
Conference Date 1996/7/24(1days)
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Registration To Superconductive Electronics (SCE)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High frequency properties of YBCO Josephson junctions on Si substrate fabricated by electron beam irradiation
Sub Title (in English)
Keyword(1) focused electron beam irradiation
Keyword(2) YBa_2Cu_3O<7-y> film
Keyword(3) Josephson junctions
Keyword(4) Si substrate
Keyword(5) high frequency response
1st Author's Name Sangjae Kim
1st Author's Affiliation Research Institute of Electrical Communication, Tohoku University()
2nd Author's Name Hiroaki Myoren
2nd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
3rd Author's Name Jian Chen
3rd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
4th Author's Name Kensuke Nakajima
4th Author's Affiliation Research Institute of Electrical Communication, Tohoku University
5th Author's Name Tsutomu Yamashita
5th Author's Affiliation Research Institute of Electrical Communication, Tohoku University
Date 1996/7/24
Paper # SCE96-11
Volume (vol) vol.96
Number (no) 174
Page pp.pp.-
#Pages 6
Date of Issue