| Presentation | 1996/10/30 Eclipse Angel Pulsed Laser Deposition Method Minoru Tachiki, Eiichi Morita, Kenji Yamada, Fang Xiaodong, Takeshi Kobayashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In spite of the advantage of droplet reduction in the Pulsed Laser Deposition (PLD) process, eclipse PLD method has some drawbacks that deposition rate decreases in low ambient pressure condition, and activated growth species are also shielded by the shadow mask. We proposed new composite shadow mask method named "eclipse angel PLD method". We confirmed growth rate enhancement of YBa_2Cu_3O_x thin films in low ambient oxygen pressure region and directly observed that emitting plume propagated at the center of the ring-masks and reached the substrate by eclipse angel method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PLD / shadow mask / YBa_2Cu_3O_x / deposition rate / framing streak camera |
| Paper # | SCE96-22 |
| Date of Issue |
| Conference Information | |
| Committee | SCE |
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| Conference Date | 1996/10/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Eclipse Angel Pulsed Laser Deposition Method |
| Sub Title (in English) | |
| Keyword(1) | PLD |
| Keyword(2) | shadow mask |
| Keyword(3) | YBa_2Cu_3O_x |
| Keyword(4) | deposition rate |
| Keyword(5) | framing streak camera |
| 1st Author's Name | Minoru Tachiki |
| 1st Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering Science, Osaka University() |
| 2nd Author's Name | Eiichi Morita |
| 2nd Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering Science, Osaka University |
| 3rd Author's Name | Kenji Yamada |
| 3rd Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering Science, Osaka University |
| 4th Author's Name | Fang Xiaodong |
| 4th Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering Science, Osaka University |
| 5th Author's Name | Takeshi Kobayashi |
| 5th Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering Science, Osaka University |
| Date | 1996/10/30 |
| Paper # | SCE96-22 |
| Volume (vol) | vol.96 |
| Number (no) | 333 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |