| Presentation | 1996/2/21 Sputtering of Nb thin films on surface-cleaned InSb substrate. Takayuki Nagaki, Akiyoshi Nakayama, Hideya Matsunaga, Kaoru Kodera, Kouji Uematsu, Masayuki Kanaya, Tomoyuki Kitani, Wataru Takahashi, Yoichi Okabe, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigate the stress of Nb thin films in-situ deposited on InSb substrates which surfaces are cleaned by annealing treatment. We also try to grow InSb films homoepitaxially on InSb substrates by MBE method. During the cleaning of the surface of InSb substrates and the homoepitaxial growth of InSb films, the surface condition of substrates are observed by RHEED patterns. It is confirmed that (3 × 1) In-stabilized structure appears if InSb films are grown by MBE on the (111)B oriented InSb substrates under the condition: the flux ratio of the molecular beams J_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MBE method / InSb / homoepitaxial growth / RHEED / flux ratio of the molecular beams / Nb stress |
| Paper # | SCE95-41 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 1996/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sputtering of Nb thin films on surface-cleaned InSb substrate. |
| Sub Title (in English) | |
| Keyword(1) | MBE method |
| Keyword(2) | InSb |
| Keyword(3) | homoepitaxial growth |
| Keyword(4) | RHEED |
| Keyword(5) | flux ratio of the molecular beams |
| Keyword(6) | Nb stress |
| 1st Author's Name | Takayuki Nagaki |
| 1st Author's Affiliation | Department of Electrical Engineering, Kanagawa University() |
| 2nd Author's Name | Akiyoshi Nakayama |
| 2nd Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 3rd Author's Name | Hideya Matsunaga |
| 3rd Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 4th Author's Name | Kaoru Kodera |
| 4th Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 5th Author's Name | Kouji Uematsu |
| 5th Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 6th Author's Name | Masayuki Kanaya |
| 6th Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 7th Author's Name | Tomoyuki Kitani |
| 7th Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 8th Author's Name | Wataru Takahashi |
| 8th Author's Affiliation | Department of Electrical Engineering, Kanagawa University |
| 9th Author's Name | Yoichi Okabe |
| 9th Author's Affiliation | Research Center for Advanced Science and Technology, University of Tokyo |
| Date | 1996/2/21 |
| Paper # | SCE95-41 |
| Volume (vol) | vol.95 |
| Number (no) | 531 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |