Presentation 1996/2/21
Counten and base electolodes of YBa_2Cu_3O_<7-δ>/SrTiO_3/YBa_2Cu_3O_<7-δ> structures for superconducting wiring
Katsuhiko Miyamoto, Tomoya Ogawa, Masao Koyanagi, Ko Hara,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have fabricatedl YBCO/STO/YBCO structures, and studied the properties of the counter and base YBCO films. The trilayer structures ware prepared by PLD technique. In order to obtain reliable STO insulating layer, the mechano-chemical-polishing (CMP) method was introduced into the process. The procedure was that the STO surface was polished by CMP and etched by ECR after for cleaning, then STO/YBCO bilayer was fabricated on YBCO/STO bilayer. Typical base and counter YBCO layers showed Tc = 91.2K and Jc(77K) = 3.6 × 10^6A/cm^2, and Tc = 87.5K and Jc (77K) =3.2 x 10^6A/cm^2, respectively. The insulation resistance between the base and the counter eletrode was more than 10MΩ at 77K. As a result, a basic structure for multilayer device was prepared with good superconducting properties.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) YBCO/STO/YBCO multilayer structures / insulating layer / mechano-chemical-polishing (CMP)
Paper # SCE95-37
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Conference Information
Committee SCE
Conference Date 1996/2/21(1days)
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Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Counten and base electolodes of YBa_2Cu_3O_<7-δ>/SrTiO_3/YBa_2Cu_3O_<7-δ> structures for superconducting wiring
Sub Title (in English)
Keyword(1) YBCO/STO/YBCO multilayer structures
Keyword(2) insulating layer
Keyword(3) mechano-chemical-polishing (CMP)
1st Author's Name Katsuhiko Miyamoto
1st Author's Affiliation Chiba Institute of Technology()
2nd Author's Name Tomoya Ogawa
2nd Author's Affiliation Electrotechnical Laboratory
3rd Author's Name Masao Koyanagi
3rd Author's Affiliation Electrotechnical Laboratory
4th Author's Name Ko Hara
4th Author's Affiliation Chiba Institute of Technology
Date 1996/2/21
Paper # SCE95-37
Volume (vol) vol.95
Number (no) 531
Page pp.pp.-
#Pages 6
Date of Issue