Presentation | 1996/2/21 Counten and base electolodes of YBa_2Cu_3O_<7-δ>/SrTiO_3/YBa_2Cu_3O_<7-δ> structures for superconducting wiring Katsuhiko Miyamoto, Tomoya Ogawa, Masao Koyanagi, Ko Hara, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have fabricatedl YBCO/STO/YBCO structures, and studied the properties of the counter and base YBCO films. The trilayer structures ware prepared by PLD technique. In order to obtain reliable STO insulating layer, the mechano-chemical-polishing (CMP) method was introduced into the process. The procedure was that the STO surface was polished by CMP and etched by ECR after for cleaning, then STO/YBCO bilayer was fabricated on YBCO/STO bilayer. Typical base and counter YBCO layers showed Tc = 91.2K and Jc(77K) = 3.6 × 10^6A/cm^2, and Tc = 87.5K and Jc (77K) =3.2 x 10^6A/cm^2, respectively. The insulation resistance between the base and the counter eletrode was more than 10MΩ at 77K. As a result, a basic structure for multilayer device was prepared with good superconducting properties. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | YBCO/STO/YBCO multilayer structures / insulating layer / mechano-chemical-polishing (CMP) |
Paper # | SCE95-37 |
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Conference Information | |
Committee | SCE |
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Conference Date | 1996/2/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Superconductive Electronics (SCE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Counten and base electolodes of YBa_2Cu_3O_<7-δ>/SrTiO_3/YBa_2Cu_3O_<7-δ> structures for superconducting wiring |
Sub Title (in English) | |
Keyword(1) | YBCO/STO/YBCO multilayer structures |
Keyword(2) | insulating layer |
Keyword(3) | mechano-chemical-polishing (CMP) |
1st Author's Name | Katsuhiko Miyamoto |
1st Author's Affiliation | Chiba Institute of Technology() |
2nd Author's Name | Tomoya Ogawa |
2nd Author's Affiliation | Electrotechnical Laboratory |
3rd Author's Name | Masao Koyanagi |
3rd Author's Affiliation | Electrotechnical Laboratory |
4th Author's Name | Ko Hara |
4th Author's Affiliation | Chiba Institute of Technology |
Date | 1996/2/21 |
Paper # | SCE95-37 |
Volume (vol) | vol.95 |
Number (no) | 531 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |