| Presentation | 1997/7/30 Effects of induction coil to YBCO thin films in sputtering : Induction-coil-coupled sputtering Masanobu KUSUNOKI, Yoshinobu TAKANO, Shigetoshi OHSHIMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Authors report on an induction-coil-coupled sputtering technique allowing the deposition of large area high-Tc superconducting thin films. This technique was proven to be able to produce uniform thin films over large areas. Uniformity in film thickness of below 7% was obtained over an area of 40-mm diameter using a 50-mm diameter YBCO target. The induction coil also played an important role in determining the qualities of YBCO thin films. The critical temperature and the density of particles on the surface of the films were influenced by the cathode voltage. On the other hand, the orientation and the grain size of the film were influenced by the cathode current. Using conventional sputtering, the cathode voltage and current cannot be varied independently, however, in this system, variation is possible by means of controlling the applied power of the induction coil. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | induction-coil-sputtering / large area / YBCO thin film / uniformity / qualities |
| Paper # | sce97-24 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 1997/7/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effects of induction coil to YBCO thin films in sputtering : Induction-coil-coupled sputtering |
| Sub Title (in English) | |
| Keyword(1) | induction-coil-sputtering |
| Keyword(2) | large area |
| Keyword(3) | YBCO thin film |
| Keyword(4) | uniformity |
| Keyword(5) | qualities |
| 1st Author's Name | Masanobu KUSUNOKI |
| 1st Author's Affiliation | Faculty of Engineering, Yamagata University() |
| 2nd Author's Name | Yoshinobu TAKANO |
| 2nd Author's Affiliation | Faculty of Engineering, Yamagata University |
| 3rd Author's Name | Shigetoshi OHSHIMA |
| 3rd Author's Affiliation | Faculty of Engineering, Yamagata University |
| Date | 1997/7/30 |
| Paper # | sce97-24 |
| Volume (vol) | vol.97 |
| Number (no) | 219 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |