Presentation 1995/11/23
Magnetic Performance of double-Layered Media Sputtered in Aluminum Chamber with Liquid Nitrogen Shroud
Hiroaki MURAOKA, Eiji NAKASHIO, Isao WATANABE, Yoshihisa NAKAMURA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A deposition of a perpendicular double layer medium with a sputtering apparatus equipped an aluminum chamber is discussed. High speed pumping and clean atmosphere of little H_2O is obtained associated with a liquid nitrogen shroud. Relatively low coercivity and smooth film surface are obtained for an underlayer of the medium. Mainly as this morphological result high output at high linear density is attained.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Sputtering apparatus / Aluminum chamber / Liquid nitrogen shroud / magnetic recording media
Paper # MR95-50
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Committee MR
Conference Date 1995/11/23(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Magnetic Performance of double-Layered Media Sputtered in Aluminum Chamber with Liquid Nitrogen Shroud
Sub Title (in English)
Keyword(1) Sputtering apparatus
Keyword(2) Aluminum chamber
Keyword(3) Liquid nitrogen shroud
Keyword(4) magnetic recording media
1st Author's Name Hiroaki MURAOKA
1st Author's Affiliation Res. Inst. Elec. Comm., Tohoku University()
2nd Author's Name Eiji NAKASHIO
2nd Author's Affiliation Res. Inst. Elec. Comm., Tohoku University
3rd Author's Name Isao WATANABE
3rd Author's Affiliation Res. Inst. Elec. Comm., Tohoku University
4th Author's Name Yoshihisa NAKAMURA
4th Author's Affiliation Res. Inst. Elec. Comm., Tohoku University
Date 1995/11/23
Paper # MR95-50
Volume (vol) vol.95
Number (no) 383
Page pp.pp.-
#Pages 6
Date of Issue