Presentation | 1995/11/23 Magnetic Performance of double-Layered Media Sputtered in Aluminum Chamber with Liquid Nitrogen Shroud Hiroaki MURAOKA, Eiji NAKASHIO, Isao WATANABE, Yoshihisa NAKAMURA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A deposition of a perpendicular double layer medium with a sputtering apparatus equipped an aluminum chamber is discussed. High speed pumping and clean atmosphere of little H_2O is obtained associated with a liquid nitrogen shroud. Relatively low coercivity and smooth film surface are obtained for an underlayer of the medium. Mainly as this morphological result high output at high linear density is attained. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Sputtering apparatus / Aluminum chamber / Liquid nitrogen shroud / magnetic recording media |
Paper # | MR95-50 |
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Conference Information | |
Committee | MR |
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Conference Date | 1995/11/23(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Magnetic Recording (MR) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Magnetic Performance of double-Layered Media Sputtered in Aluminum Chamber with Liquid Nitrogen Shroud |
Sub Title (in English) | |
Keyword(1) | Sputtering apparatus |
Keyword(2) | Aluminum chamber |
Keyword(3) | Liquid nitrogen shroud |
Keyword(4) | magnetic recording media |
1st Author's Name | Hiroaki MURAOKA |
1st Author's Affiliation | Res. Inst. Elec. Comm., Tohoku University() |
2nd Author's Name | Eiji NAKASHIO |
2nd Author's Affiliation | Res. Inst. Elec. Comm., Tohoku University |
3rd Author's Name | Isao WATANABE |
3rd Author's Affiliation | Res. Inst. Elec. Comm., Tohoku University |
4th Author's Name | Yoshihisa NAKAMURA |
4th Author's Affiliation | Res. Inst. Elec. Comm., Tohoku University |
Date | 1995/11/23 |
Paper # | MR95-50 |
Volume (vol) | vol.95 |
Number (no) | 383 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |