| Presentation | 1995/11/23 Improvement of Soft Magnetism of a-Co-Zr-Ta Spurtered Films for Backlayers in Perpendicular Magnetic Recording Media. Satoshi TANAKA, Nobuhiro MATSUSHITA, Shigeki NAKAGAWA, Masahiko NAOE, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Amorphous Co-Zr(-Ta) films which have larger saturation magnetization than Ni-Fe ones were deposited by using the facing targets sputtering (FTS) apparatus for the applications as backlayer in perpendicular magnetic recording media. Co-Zr films revealed good soft magnetism when films were prepared at low Kr gas pressure and at low substrate temperature. Ta was added to Co-Zr to enhance fine granulation and to decrease the magnetostriction constant. The minimum H_c of 0.75 Oe and the maximum μ_r of 580 were obtained for the films with composition of Co_<85.2>Zn_<3.6>Ta_<11.2>. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | backlayer / amorphous thin film / facing targets sputtering / composition ratio of Ta / low magnetostriction |
| Paper # | MR95-45 |
| Date of Issue |
| Conference Information | |
| Committee | MR |
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| Conference Date | 1995/11/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improvement of Soft Magnetism of a-Co-Zr-Ta Spurtered Films for Backlayers in Perpendicular Magnetic Recording Media. |
| Sub Title (in English) | |
| Keyword(1) | backlayer |
| Keyword(2) | amorphous thin film |
| Keyword(3) | facing targets sputtering |
| Keyword(4) | composition ratio of Ta |
| Keyword(5) | low magnetostriction |
| 1st Author's Name | Satoshi TANAKA |
| 1st Author's Affiliation | Dept. of Physical Electronics, Tokyo Institute of Technology() |
| 2nd Author's Name | Nobuhiro MATSUSHITA |
| 2nd Author's Affiliation | Dept. of Physical Electronics, Tokyo Institute of Technology |
| 3rd Author's Name | Shigeki NAKAGAWA |
| 3rd Author's Affiliation | Dept. of Physical Electronics, Tokyo Institute of Technology |
| 4th Author's Name | Masahiko NAOE |
| 4th Author's Affiliation | Dept. of Physical Electronics, Tokyo Institute of Technology |
| Date | 1995/11/23 |
| Paper # | MR95-45 |
| Volume (vol) | vol.95 |
| Number (no) | 383 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |