| Presentation | 2002/1/17 Formation of ZnO pn Junction by Excimer Laser Doping Yoshimi SHIMIZU, Hidenori NONAKA, Toru AOKI, Yoshinori HATANAKA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The a-axis oriented ZnO single crystal films on c-plane sapphire substrate were grown by plasma enhanced metaloganic chemical vapor deposition (MOCVD) using diethylzinc(DEZn) as a source of Zn and oxygen gas. The obtained FWHM of XRD peak for grown ZnO(110) was about 1000s. The Sb doping for p-type ZnO was performed for MOCVD and thermal oxidation grown ZnO film by excimer laser doping. The pn junction was fabricated between the Sb-doped ZnO layer and undoped (naturally n-type) ZnO film. The p-type ZnO layer was obtained by Sb-doping and diode like characteristic was obtained in the pn junction in the case of using ZnO grown by thermal oxidation method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / Excimer laser / MOCVD / Sb doping |
| Paper # | EID2001-99 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2002/1/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of ZnO pn Junction by Excimer Laser Doping |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | Excimer laser |
| Keyword(3) | MOCVD |
| Keyword(4) | Sb doping |
| 1st Author's Name | Yoshimi SHIMIZU |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka Unviersity() |
| 2nd Author's Name | Hidenori NONAKA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka Unviersity |
| 3rd Author's Name | Toru AOKI |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka Unviersity |
| 4th Author's Name | Yoshinori HATANAKA |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka Unviersity |
| Date | 2002/1/17 |
| Paper # | EID2001-99 |
| Volume (vol) | vol.101 |
| Number (no) | 599 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |