Presentation | 2001/6/14 Exciton emission properties of epitaxial ZnO thin films grown on Si substrate A. Miyake, H. Kominami, T. Aoki, N. Azuma, Y. Nakanishi, Y. Hatanaka, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | ZnO epitaxial thin film could be growth on Si(111) substrate by oxidation of ZnS epitaxial thin film grown on the substrate by electron beam evaporation technique. Near ultraviolet emissions due to exciton emissions of ZnO were also obtained. Growth conditions to obtain the strong ultraviolet emission from the film were investigated. The best emission properties were obiain when the ZnS epitaxial film was grown on Si substrate at a substrate temperature of 270℃ and the film was annealed at 720℃ in O2 flow for at least 2 hours. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ZnO / Oxidation / epitaxial growth / Thin film / exciton emission / Si substrate |
Paper # | EID2001-12 |
Date of Issue |
Conference Information | |
Committee | EID |
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Conference Date | 2001/6/14(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
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Topics (in English) | |
Chair | |
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Paper Information | |
Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Exciton emission properties of epitaxial ZnO thin films grown on Si substrate |
Sub Title (in English) | |
Keyword(1) | ZnO |
Keyword(2) | Oxidation |
Keyword(3) | epitaxial growth |
Keyword(4) | Thin film |
Keyword(5) | exciton emission |
Keyword(6) | Si substrate |
1st Author's Name | A. Miyake |
1st Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University() |
2nd Author's Name | H. Kominami |
2nd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
3rd Author's Name | T. Aoki |
3rd Author's Affiliation | Research Instituie of Electronics, Shizuoka University |
4th Author's Name | N. Azuma |
4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
5th Author's Name | Y. Nakanishi |
5th Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University:Research Instituie of Electronics, Shizuoka University |
6th Author's Name | Y. Hatanaka |
6th Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University:Research Instituie of Electronics, Shizuoka University |
Date | 2001/6/14 |
Paper # | EID2001-12 |
Volume (vol) | vol.101 |
Number (no) | 118 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |