| Presentation | 2000/10/13 The Crystallization and Hydrogenation Processes of Low Temperature Poly-Si Manufacture Chu-Jung Shih, Li-Ming Wane, Shih-Chang Chang, I-Min Lu, I-Wei Wu, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Laser crystallization and hydrogenation technologies are the most critical processes in the manufacturing of low temperature poly-Si(LTPS)TFT's. In this paper, the effects of single-pulse laser beam profile on the crystallization of poly-silicon were investigated. In addition, the surface roughness of poly-Si films annealed by various laser-overlapping ratios was carried to verify the effects of laser beam profiles. Furthermore, the electrical characteristics of hydrogenated LTPS TFT's by H_2/Ar RF plasma or PECVD silicon nitride capping layer were also investigated as a function of the hydrogenation time. |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | EID2000-119 |
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| Committee | EID |
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| Conference Date | 2000/10/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Crystallization and Hydrogenation Processes of Low Temperature Poly-Si Manufacture |
| Sub Title (in English) | |
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| 1st Author's Name | Chu-Jung Shih |
| 1st Author's Affiliation | Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan() |
| 2nd Author's Name | Li-Ming Wane |
| 2nd Author's Affiliation | Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan |
| 3rd Author's Name | Shih-Chang Chang |
| 3rd Author's Affiliation | Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan |
| 4th Author's Name | I-Min Lu |
| 4th Author's Affiliation | Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan |
| 5th Author's Name | I-Wei Wu |
| 5th Author's Affiliation | Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan |
| Date | 2000/10/13 |
| Paper # | EID2000-119 |
| Volume (vol) | vol.100 |
| Number (no) | 356 |
| Page | pp.pp.- |
| #Pages | 5 |
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