Presentation 2000/6/30
Control of oxygen vacancy concentration on ZnO:Zn phosphor thin films prepared by PLD technique
Kennosuke Kakehi, Takashi Kunimoto, Alias Daud, Koutoku Ohmi, Shosaku Tanaka, Hiroshi Kobayashi,
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Abstract(in English) ZnO:Zn phosphor thin films have been prepared by PLD(Pulsed Laser Deposition) technique. Optical emission spectroscopy of the laser produced plume was used to characterize the deposition process. All deposited films are oriented to the c-axis of wurtzite ZnO crystal. The film, which shows efficient green PL emission, was prepared by controlling the substrate temperature around 250℃. At the present, it is difficult to control the oxygen vacancy concentration using post-annealing of the deposited films and also preparing the films with assisted reactive gasses. The emission ratio of O(777nm)/Zn(635nm)is related to the green PL intensity of the deposited films. By the monitoring these emission lines, deposition parameters such as laser fluence and target-substrate distance will be optimized to obtain an efficient ZnO:Zn phosphor thin film.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ZnO:Zn phosphor thin film / PLD / Laser produced plume / Oxygen vacancy
Paper # EID2000-28
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Committee EID
Conference Date 2000/6/30(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Control of oxygen vacancy concentration on ZnO:Zn phosphor thin films prepared by PLD technique
Sub Title (in English)
Keyword(1) ZnO:Zn phosphor thin film
Keyword(2) PLD
Keyword(3) Laser produced plume
Keyword(4) Oxygen vacancy
1st Author's Name Kennosuke Kakehi
1st Author's Affiliation Department of Electrical and Electronic Engineering Tottori University()
2nd Author's Name Takashi Kunimoto
2nd Author's Affiliation Department of Electrical and Electronic Engineering Tottori University
3rd Author's Name Alias Daud
3rd Author's Affiliation Department of Electrical and Electronic Engineering Tottori University
4th Author's Name Koutoku Ohmi
4th Author's Affiliation Department of Electrical and Electronic Engineering Tottori University
5th Author's Name Shosaku Tanaka
5th Author's Affiliation Department of Electrical and Electronic Engineering Tottori University
6th Author's Name Hiroshi Kobayashi
6th Author's Affiliation Department of Electrical and Electronic Engineering Tottori University
Date 2000/6/30
Paper # EID2000-28
Volume (vol) vol.100
Number (no) 168
Page pp.pp.-
#Pages 6
Date of Issue