Presentation 2000/6/16
Principle of the ferrolectric direct emission type infrared imaging sensor
Katsuhiko Tomita, Daisuke Takamuro, Kazuaki Sawada, Makoto Ishida,
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Abstract(in English) We propose a new field emission type infrared sensor, which is constructed with a PZT ceramic as ferroelectrics material and an Al electrode. The Al electrode is separated by a quartz plate (the distance between the Al electrode and the PZT plate kept about 10μm.) On this sensor, a PZT ceramic plate act field emitter and the Al is an anode electrode. The PZT plate was irradiated by infrared light in a vacuum chamber. From the experiment, anode current was lineally proportional to the incident infrared light power, and the principle of this sensor was confirmed. An emission current is also increase as the anode voltage is increase. On the other hand, the increment of the emission current was not observed on the sensor used a PZT which had reverse spontaneous polarization.
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Keyword(in English) infrared / image sensor / pyroelectrics / ferroelectrics / filed emitter / MOSFET
Paper # EID2000-19
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Committee EID
Conference Date 2000/6/16(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Principle of the ferrolectric direct emission type infrared imaging sensor
Sub Title (in English)
Keyword(1) infrared
Keyword(2) image sensor
Keyword(3) pyroelectrics
Keyword(4) ferroelectrics
Keyword(5) filed emitter
Keyword(6) MOSFET
1st Author's Name Katsuhiko Tomita
1st Author's Affiliation Department of Electrical and Electronic Engneering Toyohashi University of Technology()
2nd Author's Name Daisuke Takamuro
2nd Author's Affiliation Department of Electrical and Electronic Engneering Toyohashi University of Technology
3rd Author's Name Kazuaki Sawada
3rd Author's Affiliation Department of Electrical and Electronic Engneering Toyohashi University of Technology
4th Author's Name Makoto Ishida
4th Author's Affiliation Department of Electrical and Electronic Engneering Toyohashi University of Technology
Date 2000/6/16
Paper # EID2000-19
Volume (vol) vol.100
Number (no) 133
Page pp.pp.-
#Pages 6
Date of Issue