| Presentation | 2000/6/16 Excimer Laser doping for compound semiconductor and Study of the pixel technique for image detector A. Nakamura, D. Noda, M. Niraula, T. Aoki, Y. Hatanaka, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | II-VI compound semiconductor CdTe is an attractive semiconductor material for applications to solid-state high-energy x-ray and γ-ray imaging systems. We have studied the laser doping technique for fabrication to reticulated detectors. This technique is suitable for the spatially patterned doping to be applied for the fabrication of integrated two-dimensional imaging device. Na_2Te, Sb as p-type dopants and In as n-type dopant for the single crystal CbTe were examined by Eximer laser doping technique. The Hall concentration was +1.39e+19/cm^3 and Electron concentration was -8.95e+18/cm^3. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Excimer laser / patterned doping / Na_2Te / Sb / In |
| Paper # | EID2000-18 |
| Date of Issue |
| Conference Information | |
| Committee | EID |
|---|---|
| Conference Date | 2000/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Excimer Laser doping for compound semiconductor and Study of the pixel technique for image detector |
| Sub Title (in English) | |
| Keyword(1) | Excimer laser |
| Keyword(2) | patterned doping |
| Keyword(3) | Na_2Te |
| Keyword(4) | Sb |
| Keyword(5) | In |
| 1st Author's Name | A. Nakamura |
| 1st Author's Affiliation | Research Institute of Electronics Shizuoka University() |
| 2nd Author's Name | D. Noda |
| 2nd Author's Affiliation | Research Institute of Electronics Shizuoka University |
| 3rd Author's Name | M. Niraula |
| 3rd Author's Affiliation | Research Institute of Electronics Shizuoka University |
| 4th Author's Name | T. Aoki |
| 4th Author's Affiliation | Research Institute of Electronics Shizuoka University |
| 5th Author's Name | Y. Hatanaka |
| 5th Author's Affiliation | Research Institute of Electronics Shizuoka University |
| Date | 2000/6/16 |
| Paper # | EID2000-18 |
| Volume (vol) | vol.100 |
| Number (no) | 133 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |