Presentation 2000/6/16
Correlation between ballistic electron emission characteristics and photoluminescent properties of cold cathode based on porous polycrystalline silicon
Tsutomu Ichihara, Takuya Komoda, Nobuyoshi Koshida,
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Abstract(in English) It is shown that is a strong correlation between the emission efficiency and silicon nanostructure in a porous polysilicon (PPS) cold cathode. Nondoped polysilicon layer is formed on an n-type<100>silicon wafer and anodized in a solution of HF(50%):ethanol=1:1 under illumination by a 500 Wtungsten lamp. Subsequently, a PPS layer is oxidized in a rapid thermal oxidation (RTO) furnace for 1 hour at a temperature of 900 C.A thin Au film is deposited onto the PPS layer as a positive electrode. The silicon nanostructures are evaluated by photoluminescent spectra. The PPS which has luminescent peak from Si nanocrystallites shows higher emission efficiency. This result supports our multitunneling model which leads to generate quasi-ballistic electron in a PPS cold cathode.
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Keyword(in English) FED / cold cathode / ballistic electron emission / nanocrystalline Si / photo luminescence
Paper # EID2000-12
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Committee EID
Conference Date 2000/6/16(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Correlation between ballistic electron emission characteristics and photoluminescent properties of cold cathode based on porous polycrystalline silicon
Sub Title (in English)
Keyword(1) FED
Keyword(2) cold cathode
Keyword(3) ballistic electron emission
Keyword(4) nanocrystalline Si
Keyword(5) photo luminescence
1st Author's Name Tsutomu Ichihara
1st Author's Affiliation Advanced Technology Research Laboratory, Matsushita Electric Works, Ltd.()
2nd Author's Name Takuya Komoda
2nd Author's Affiliation Advanced Technology Research Laboratory, Matsushita Electric Works, Ltd.
3rd Author's Name Nobuyoshi Koshida
3rd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology
Date 2000/6/16
Paper # EID2000-12
Volume (vol) vol.100
Number (no) 133
Page pp.pp.-
#Pages 6
Date of Issue