| Presentation | 2000/6/15 Expermental and Theoretical Studies of Reactive Sputtering Prosess for MgO Film Deposition Yoshinobu Matsuda, Koji Ohtomo, Hiroshi Fujiyama, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Preparation of MgO thin films using reactive magnetron sputtering of Mg target in argon/ oxygen mixture is fascinating with respect to decreased process cost and improved film quality, irrespective of its small deposition rate. Fabrication and control of MgO films by this process was studied experimentally and theoretically. First, the experimental results of mode transition observed in sputter-deposition property associated with the discharge property are reported. Next, a reactive sputtering model considering the particle balance of oxygen as well as the change in secondary electron emission coefficient on the target is shown. Based on them, quantitative and systematic modeling of reactive sputtering of Mg target is discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MgO / reactive sputtering / mode transition / modeling / secondary electron emission |
| Paper # | EID2000-7 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2000/6/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Expermental and Theoretical Studies of Reactive Sputtering Prosess for MgO Film Deposition |
| Sub Title (in English) | |
| Keyword(1) | MgO |
| Keyword(2) | reactive sputtering |
| Keyword(3) | mode transition |
| Keyword(4) | modeling |
| Keyword(5) | secondary electron emission |
| 1st Author's Name | Yoshinobu Matsuda |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University() |
| 2nd Author's Name | Koji Ohtomo |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
| 3rd Author's Name | Hiroshi Fujiyama |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
| Date | 2000/6/15 |
| Paper # | EID2000-7 |
| Volume (vol) | vol.100 |
| Number (no) | 132 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |