| Presentation | 2000/6/15 Visualization of Spatial Profiles of Plasmas and Sputtered Atoms : Planar Magnetron Discharge and PDP Discharge Yoshinobu Matsuda, Koji Ohtomo, Hidenori Ohta, Hiroshi Fujiyama, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Experimental results of optical emission and laser induced fluorescence measurements of plasma and sputtered atoms in the reactive sputter-deposition process of indium tin oxide films which have been used as transparent conductive electrodes in PDP, are presented.In addition, preliminary experimental results of spatio-temporally resolved optical emission measurement, which has been done recently using 3 inch AC-PDP test cell, are presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | planar magnetron / ITO / reactive sputtering / optical emission / PDP |
| Paper # | EID2000-3 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2000/6/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Visualization of Spatial Profiles of Plasmas and Sputtered Atoms : Planar Magnetron Discharge and PDP Discharge |
| Sub Title (in English) | |
| Keyword(1) | planar magnetron |
| Keyword(2) | ITO |
| Keyword(3) | reactive sputtering |
| Keyword(4) | optical emission |
| Keyword(5) | PDP |
| 1st Author's Name | Yoshinobu Matsuda |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University() |
| 2nd Author's Name | Koji Ohtomo |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
| 3rd Author's Name | Hidenori Ohta |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
| 4th Author's Name | Hiroshi Fujiyama |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
| Date | 2000/6/15 |
| Paper # | EID2000-3 |
| Volume (vol) | vol.100 |
| Number (no) | 132 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |