Presentation | 2000/6/15 Visualization of Spatial Profiles of Plasmas and Sputtered Atoms : Planar Magnetron Discharge and PDP Discharge Yoshinobu Matsuda, Koji Ohtomo, Hidenori Ohta, Hiroshi Fujiyama, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Experimental results of optical emission and laser induced fluorescence measurements of plasma and sputtered atoms in the reactive sputter-deposition process of indium tin oxide films which have been used as transparent conductive electrodes in PDP, are presented.In addition, preliminary experimental results of spatio-temporally resolved optical emission measurement, which has been done recently using 3 inch AC-PDP test cell, are presented. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | planar magnetron / ITO / reactive sputtering / optical emission / PDP |
Paper # | EID2000-3 |
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Committee | EID |
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Conference Date | 2000/6/15(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Visualization of Spatial Profiles of Plasmas and Sputtered Atoms : Planar Magnetron Discharge and PDP Discharge |
Sub Title (in English) | |
Keyword(1) | planar magnetron |
Keyword(2) | ITO |
Keyword(3) | reactive sputtering |
Keyword(4) | optical emission |
Keyword(5) | PDP |
1st Author's Name | Yoshinobu Matsuda |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University() |
2nd Author's Name | Koji Ohtomo |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
3rd Author's Name | Hidenori Ohta |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
4th Author's Name | Hiroshi Fujiyama |
4th Author's Affiliation | Department of Electrical and Electronic Engineering, Nagasaki University |
Date | 2000/6/15 |
Paper # | EID2000-3 |
Volume (vol) | vol.100 |
Number (no) | 132 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |