Presentation 2000/1/27
Luminescent properties of ZnO thin film grown epitaxially on Si substrate using ZnS buffer layer
A. Miyake, H. Kominami, H. Tatsuoka, H. Kuwabara, Y. Nakanishi, Y. Hatanaka,
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Abstract(in English) The growth of ZnO thin films which show exciton emission has bean tried on Si(111)substrate using an epitaxial of ZnS buffer layer. The ZnO films showed c-axis orientation and their crystallinity was improved by annealing. The epitaxial ZnO films was successfully grown with the orientation of (0002), [112^^-0]ZnO / / (111), [11^^-0]ZnS / / (111), [11^^-0]Si(111)at a substrate temperature of 400℃ or more. The films which were annealed at 1000℃ showed the exciton emission at 3.35eV by exciting at 325 nm of He-Cd laser. On the other hand, the film showed a broad emission with a peak at around 2.2eV at room temperature.
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Keyword(in English) ZnO / thin film / epitaxial / exciton / PL / UV
Paper # EID99-85
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Committee EID
Conference Date 2000/1/27(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Luminescent properties of ZnO thin film grown epitaxially on Si substrate using ZnS buffer layer
Sub Title (in English)
Keyword(1) ZnO
Keyword(2) thin film
Keyword(3) epitaxial
Keyword(4) exciton
Keyword(5) PL
Keyword(6) UV
1st Author's Name A. Miyake
1st Author's Affiliation Research Institute of Electronics, Shizuoka University()
2nd Author's Name H. Kominami
2nd Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University
3rd Author's Name H. Tatsuoka
3rd Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University : Faculty of Engineering, Shizuoka University
4th Author's Name H. Kuwabara
4th Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University : Faculty of Engineering, Shizuoka University
5th Author's Name Y. Nakanishi
5th Author's Affiliation Research Institute of Electronics, Shizuoka University : Graduate School of Electronic Science and Technology, Shizuoka University
6th Author's Name Y. Hatanaka
6th Author's Affiliation Research Institute of Electronics, Shizuoka University : Graduate School of Electronic Science and Technology, Shizuoka University
Date 2000/1/27
Paper # EID99-85
Volume (vol) vol.99
Number (no) 597
Page pp.pp.-
#Pages 5
Date of Issue