Presentation | 2000/1/27 Luminescent properties of ZnO thin film grown epitaxially on Si substrate using ZnS buffer layer A. Miyake, H. Kominami, H. Tatsuoka, H. Kuwabara, Y. Nakanishi, Y. Hatanaka, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The growth of ZnO thin films which show exciton emission has bean tried on Si(111)substrate using an epitaxial of ZnS buffer layer. The ZnO films showed c-axis orientation and their crystallinity was improved by annealing. The epitaxial ZnO films was successfully grown with the orientation of (0002), [112^^-0]ZnO / / (111), [11^^-0]ZnS / / (111), [11^^-0]Si(111)at a substrate temperature of 400℃ or more. The films which were annealed at 1000℃ showed the exciton emission at 3.35eV by exciting at 325 nm of He-Cd laser. On the other hand, the film showed a broad emission with a peak at around 2.2eV at room temperature. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ZnO / thin film / epitaxial / exciton / PL / UV |
Paper # | EID99-85 |
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Conference Information | |
Committee | EID |
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Conference Date | 2000/1/27(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Luminescent properties of ZnO thin film grown epitaxially on Si substrate using ZnS buffer layer |
Sub Title (in English) | |
Keyword(1) | ZnO |
Keyword(2) | thin film |
Keyword(3) | epitaxial |
Keyword(4) | exciton |
Keyword(5) | PL |
Keyword(6) | UV |
1st Author's Name | A. Miyake |
1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
2nd Author's Name | H. Kominami |
2nd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
3rd Author's Name | H. Tatsuoka |
3rd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University : Faculty of Engineering, Shizuoka University |
4th Author's Name | H. Kuwabara |
4th Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University : Faculty of Engineering, Shizuoka University |
5th Author's Name | Y. Nakanishi |
5th Author's Affiliation | Research Institute of Electronics, Shizuoka University : Graduate School of Electronic Science and Technology, Shizuoka University |
6th Author's Name | Y. Hatanaka |
6th Author's Affiliation | Research Institute of Electronics, Shizuoka University : Graduate School of Electronic Science and Technology, Shizuoka University |
Date | 2000/1/27 |
Paper # | EID99-85 |
Volume (vol) | vol.99 |
Number (no) | 597 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |