Presentation 2000/1/27
Fabrication of a ZnO Diode by Excimer laser Doping
Toyonori Kusuhara, Toru Aoki, Yoshinori Hatanaka, David C. Look,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) Fabrication of p-type ZnO layer on a single crystal ZnO substrate was carried out using Zn_3P_2 as a dopant source by excimer laser radiation. It was found with PL measurement that, under high-pressure oxygen atmosphere, it is able to avoid to form oxygen vacancies which was caused by excimer laser radiation on the ZnO surface. Moreover, the diode I-V characteristics were obtained when p-type ZnO layer was formed on low resistivity n-type ZnO substrate, and white-violet colour emission was observed by current injection under 110 K. This emission spectrum included a peak around 370 nm wavelength attributed to band edge emission.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ZnO / Light emitting diode / Laser doping / Eximer laser
Paper # EID99-84
Date of Issue

Conference Information
Committee EID
Conference Date 2000/1/27(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Electronic Information Displays (EID)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of a ZnO Diode by Excimer laser Doping
Sub Title (in English)
Keyword(1) ZnO
Keyword(2) Light emitting diode
Keyword(3) Laser doping
Keyword(4) Eximer laser
1st Author's Name Toyonori Kusuhara
1st Author's Affiliation Reserch Institute of Electronics, Shizuoka University()
2nd Author's Name Toru Aoki
2nd Author's Affiliation Reserch Institute of Electronics, Shizuoka University
3rd Author's Name Yoshinori Hatanaka
3rd Author's Affiliation Reserch Institute of Electronics, Shizuoka University
4th Author's Name David C. Look
4th Author's Affiliation Semiconducter Research Center Wright State University
Date 2000/1/27
Paper # EID99-84
Volume (vol) vol.99
Number (no) 597
Page pp.pp.-
#Pages 6
Date of Issue