| Presentation | 1999/6/25 Patterrned laser doping for High energy flux detector D. Mochizuki, M. Niraula, T. Aoki, H. Takahashi, Y. Tomita, T. Nihashi, Y. Hatanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CdTe is an attractive semiconductor material for applications in solid-state high-energy x-ray and γ-ray imaging systems. We have studied a laser doping technique for the fabrication to p-type layers. This technique is also suitable for the spatially patterned doping and can be applied in the fabrication of an integrated CdTe device for two-dimensional imaging systems. An iodine-doped n-CdTe epitaxial layer was grown on single-crystal CdTe (111) using MOCVD method. On the other side, p-type doping was demonstrated in the form of minute patterns using our laser-processing technique. This device showed clear patterns reproduced with spatial resolution greater than 10lp/mm when mounted on a vidicon type X-ray camera tube. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cadmium Telluride / High energy flux / Excimer laser / Patterned doping |
| Paper # | EID99-16 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1999/6/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Patterrned laser doping for High energy flux detector |
| Sub Title (in English) | |
| Keyword(1) | Cadmium Telluride |
| Keyword(2) | High energy flux |
| Keyword(3) | Excimer laser |
| Keyword(4) | Patterned doping |
| 1st Author's Name | D. Mochizuki |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | M. Niraula |
| 2nd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
| 3rd Author's Name | T. Aoki |
| 3rd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
| 4th Author's Name | H. Takahashi |
| 4th Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
| 5th Author's Name | Y. Tomita |
| 5th Author's Affiliation | Electron Tude R&D Center, Hamamatu Photonics K. K., Shizuoka University |
| 6th Author's Name | T. Nihashi |
| 6th Author's Affiliation | Electron Tude R&D Center, Hamamatu Photonics K. K., Shizuoka University |
| 7th Author's Name | Y. Hatanaka |
| 7th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University |
| Date | 1999/6/25 |
| Paper # | EID99-16 |
| Volume (vol) | vol.99 |
| Number (no) | 144 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |