| Presentation | 1999/3/19 A BCE-type α-Si TFT with an Island Metal Masking Structure J. H. Chen, T. H. Huang, Y. E. Chen, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new back channel etched hydrogenated thin film transistor (TFT) device with an island metal masking structure has been proposed and fabricated. The TFT structure contained a continue layer deposition process of SiNx/a-Si/n+a-Si/Metal, and finally resulted in an additional metal layer between source/drain metals and island. The channel metal was etched in the S/D metal mask patterning simultaneously. Results showed the newly designed TFT device exhibiting some characteristics: (i) good S/D metal/n+a-Si contact; (ii) prevention of plasma damage during processing especially for oxygen plasma ashing and (iii) without additional mask. These advantages will be helpful for a wider range of process window in large area mass production a-Si TFT fabrications. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | thin film tranasistor (TFT) / island metal masking / plasma damage |
| Paper # | EID98-253 |
| Date of Issue |
| Conference Information | |
| Committee | EID |
|---|---|
| Conference Date | 1999/3/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A BCE-type α-Si TFT with an Island Metal Masking Structure |
| Sub Title (in English) | |
| Keyword(1) | thin film tranasistor (TFT) |
| Keyword(2) | island metal masking |
| Keyword(3) | plasma damage |
| 1st Author's Name | J. H. Chen |
| 1st Author's Affiliation | Electronics Research and Service Organization, Industrial Technology Research Institute() |
| 2nd Author's Name | T. H. Huang |
| 2nd Author's Affiliation | Electronics Research and Service Organization, Industrial Technology Research Institute |
| 3rd Author's Name | Y. E. Chen |
| 3rd Author's Affiliation | Electronics Research and Service Organization, Industrial Technology Research Institute |
| Date | 1999/3/19 |
| Paper # | EID98-253 |
| Volume (vol) | vol.98 |
| Number (no) | 666 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |