Presentation 1999/3/19
SIMULATION OF MASK DESIGN
Wen-Chi Chen, Chun-Hung Lu, Ching-Hsiang Tseng,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A simulalion program of CRT design, specially focused on mask design, is proposed in the present study. Incorporating the back-tracing results of exposure system along with three-dimensional special geometric relations, the weighted least square method is applied to solve the characteristics of each R-G-B trio in full screen. The nesting arrangement for full screen is obtained by setting a flat mask pattern, included as horizontal/vertical pitches and aperture size. In the same manner, the landing distribution of electron beam could be found by inputting the magnitude of misregistrations. The improvement of mask design is judged according to the increase in the guard-band of nesting distribution. Graphic User Interface (GUI) is another target in this work. Within GUI environment design engineers can comfortably operate the simulation system to input mentioned design parameters, such as: flat mask pattern, formed mask geometry, q spacing, etc. Also, the simulation results, both R-G-B trio and nesting arrangement, can be shown graphically.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Weighted Least Square Method / R-G-B Trio / Nesting / Mask design / Simulation / GUI
Paper # EID98-245
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Committee EID
Conference Date 1999/3/19(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) SIMULATION OF MASK DESIGN
Sub Title (in English)
Keyword(1) Weighted Least Square Method
Keyword(2) R-G-B Trio
Keyword(3) Nesting
Keyword(4) Mask design
Keyword(5) Simulation
Keyword(6) GUI
1st Author's Name Wen-Chi Chen
1st Author's Affiliation CRT R&D Division, ChungHwa Picture Tubes. Ltd.()
2nd Author's Name Chun-Hung Lu
2nd Author's Affiliation CRT R&D Division, ChungHwa Picture Tubes. Ltd.
3rd Author's Name Ching-Hsiang Tseng
3rd Author's Affiliation CRT R&D Division, ChungHwa Picture Tubes. Ltd.
Date 1999/3/19
Paper # EID98-245
Volume (vol) vol.98
Number (no) 666
Page pp.pp.-
#Pages 5
Date of Issue