| Presentation | 1999/3/18 Laser doping technique for II-VI semiconductors, ZnSe and CdTe Y. Hatanaka, T. Aoki, M. Niraula, Y. Aoki, Y. Nakanishi, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The p-type doping of wide band gap II-VI semiconductors is a key technology for the formation of ohmic contacts with metal electrodes in device fabrication. Using alkaline metal compounds such as Na_2Se or Na_2Te, which contain dopant atoms, laser doping experiments were carried out for ZnSe and CdTe. The influences of laser light treatment on the electrical properties of semiconductors were studied mainly by means of the Hall effect measurements and current-voltage (I-V) characteristics. As a result of p-type doping, the resistivity of ZnSe drastically decreased from 10^5 to 10^<-2> Ω cm and the value of hole carrier concentration increased up to 4.8x10^<19> cm^<-3>. Similarly, for CdTe the resistivity decreased from 10^5 to 10^&llt;-1> Ω cm. Formation of p-type ohmic contact in ZnSe and CdTe diodes was also investigated |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | EID98-211 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1999/3/18(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Laser doping technique for II-VI semiconductors, ZnSe and CdTe |
| Sub Title (in English) | |
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| 1st Author's Name | Y. Hatanaka |
| 1st Author's Affiliation | Research Institute of Electronics, Graduate School of Electronic Science and Technology, Shizuoka University() |
| 2nd Author's Name | T. Aoki |
| 2nd Author's Affiliation | Research Institute of Electronics, Graduate School of Electronic Science and Technology, Shizuoka University |
| 3rd Author's Name | M. Niraula |
| 3rd Author's Affiliation | Research Institute of Electronics, Graduate School of Electronic Science and Technology, Shizuoka University |
| 4th Author's Name | Y. Aoki |
| 4th Author's Affiliation | Research Institute of Electronics, Graduate School of Electronic Science and Technology, Shizuoka University |
| 5th Author's Name | Y. Nakanishi |
| 5th Author's Affiliation | Research Institute of Electronics, Graduate School of Electronic Science and Technology, Shizuoka University |
| Date | 1999/3/18 |
| Paper # | EID98-211 |
| Volume (vol) | vol.98 |
| Number (no) | 665 |
| Page | pp.pp.- |
| #Pages | 4 |
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