Presentation 1999/3/18
Vacuum Packaging using Anodic Bonding and Emission Characteristics of FED
Duck-Jung Lee, Byeong-Kwon Ju, Jee-Won Jeong, Hoon Kim, Sung-Jae Jung, Jin Jang, Myung-Hwan Oh,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this paper, we suggest the FED packaging technology using anodic bonding method. Amorphous silicon film deposited on glass was contacted with glass substrate followed by bonded. Glass-glass bonding is based on conventional silicon-glass bonding mechanism and achieved successfully. The FED panel having opened exhausting hole was formed by glass frit process and sealed by capping glass. From the leak test in a bonded interface, the inner pressure of panel was kept continuously during pumping out. A light emission was observed from the packaged 0.7-inch FED, then anode current was 34μA. Emission stability was constantly measured for 11 hours.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Glass bonding / Silicon film / Leak test / Packaged FED / Light emission / Stability
Paper # EID98-208
Date of Issue

Conference Information
Committee EID
Conference Date 1999/3/18(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Electronic Information Displays (EID)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Vacuum Packaging using Anodic Bonding and Emission Characteristics of FED
Sub Title (in English)
Keyword(1) Glass bonding
Keyword(2) Silicon film
Keyword(3) Leak test
Keyword(4) Packaged FED
Keyword(5) Light emission
Keyword(6) Stability
1st Author's Name Duck-Jung Lee
1st Author's Affiliation Electronic Materials and Devices Research Center Korea Institute of Science and Technology()
2nd Author's Name Byeong-Kwon Ju
2nd Author's Affiliation Electronic Materials and Devices Research Center Korea Institute of Science and Technology
3rd Author's Name Jee-Won Jeong
3rd Author's Affiliation Electronic Materials and Devices Research Center Korea Institute of Science and Technology
4th Author's Name Hoon Kim
4th Author's Affiliation Electronic Materials and Devices Research Center Korea Institute of Science and Technology
5th Author's Name Sung-Jae Jung
5th Author's Affiliation Orion Electric Co. Ltd.
6th Author's Name Jin Jang
6th Author's Affiliation Department of Physics, Kyunghee University
7th Author's Name Myung-Hwan Oh
7th Author's Affiliation Electronic Materials and Devices Research Center Korea Institute of Science and Technology
Date 1999/3/18
Paper # EID98-208
Volume (vol) vol.98
Number (no) 665
Page pp.pp.-
#Pages 4
Date of Issue