| Presentation | 1999/1/21 Development of a MgO film quality evaluation Y. Agawa, Y. Yamamoto, S. Amano, N. Sasaki, J. Yuyama, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We are developing a system which measures the secondary electron yield(γ-value)of MgO films. The γ-value is determined by measuring the secondary electron current ejected from the sample irradiated by a mass analyzed ion beam of 50～1000 eV. To improve the S/N ratio the system is designed to suppress electrons generated in the beam transport and to keep the vacuum pressure lower than 10^<-7>Pa. Prior to the construction of this system, we measure γ-values of W and MgO films by Xe ion beam irradiation using an existing low energy ion beam facility. Two kinds of MgO samples were evaporated on stainless steel with different orientations. The obtained γ-value for W is constant over the energy range from 100 to 1000 eV and about 0.02. The γ-value for MgO film showed energy dependence and difference with orientation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | the secondary electron yield / MgO films / orientation |
| Paper # | EID98-104 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1999/1/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of a MgO film quality evaluation |
| Sub Title (in English) | |
| Keyword(1) | the secondary electron yield |
| Keyword(2) | MgO films |
| Keyword(3) | orientation |
| 1st Author's Name | Y. Agawa |
| 1st Author's Affiliation | ULVAC JAPAN, Ltd.() |
| 2nd Author's Name | Y. Yamamoto |
| 2nd Author's Affiliation | ULVAC JAPAN, Ltd. |
| 3rd Author's Name | S. Amano |
| 3rd Author's Affiliation | ULVAC JAPAN, Ltd. |
| 4th Author's Name | N. Sasaki |
| 4th Author's Affiliation | ULVAC JAPAN, Ltd. |
| 5th Author's Name | J. Yuyama |
| 5th Author's Affiliation | ULVAC JAPAN, Ltd. |
| Date | 1999/1/21 |
| Paper # | EID98-104 |
| Volume (vol) | vol.98 |
| Number (no) | 549 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |