Presentation 1999/1/21
ZnO thin films prepared by vacuum evaporation
Aki Miyake, Hiroko Kominami, Toru Aoki, Hirokazu Tatsuoka, Hiroshi Kuwabara, Yoichiro Nakanishi, Yoshinori Hatanaka,
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Abstract(in English) The dependence of the structural, photoluminescent and cathodoluminescent properties of ZnO thin films deposited by electron beam evaporation on the preparation conditions has been investigated. The films deposited at 200℃ to 400℃ showed c-axis orientation. The films showed two kind of emission with peaks at around 510nm or 540nm depending on the temperature and atomosphere at annealing. The film annealed at 800℃ in air showed CL luminance of about 60 cd/m^2 under excitation with 2kV, 400μA/cm^2. Moreover, it showed CL without charging-up under excitation even at 250V.
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Keyword(in English) electron beam evaporation / ZnO / thin film / phosphor / PL / CL
Paper # EID98-86
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Committee EID
Conference Date 1999/1/21(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) ZnO thin films prepared by vacuum evaporation
Sub Title (in English)
Keyword(1) electron beam evaporation
Keyword(2) ZnO
Keyword(3) thin film
Keyword(4) phosphor
Keyword(5) PL
Keyword(6) CL
1st Author's Name Aki Miyake
1st Author's Affiliation Research Institute of Electronics, Shizuoka University()
2nd Author's Name Hiroko Kominami
2nd Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University
3rd Author's Name Toru Aoki
3rd Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University
4th Author's Name Hirokazu Tatsuoka
4th Author's Affiliation Faculty of Engineering, Shizuoka University
5th Author's Name Hiroshi Kuwabara
5th Author's Affiliation Faculty of Engineering, Shizuoka University
6th Author's Name Yoichiro Nakanishi
6th Author's Affiliation Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University
7th Author's Name Yoshinori Hatanaka
7th Author's Affiliation Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University
Date 1999/1/21
Paper # EID98-86
Volume (vol) vol.98
Number (no) 549
Page pp.pp.-
#Pages 6
Date of Issue