Presentation | 1999/1/21 ZnO thin films prepared by vacuum evaporation Aki Miyake, Hiroko Kominami, Toru Aoki, Hirokazu Tatsuoka, Hiroshi Kuwabara, Yoichiro Nakanishi, Yoshinori Hatanaka, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The dependence of the structural, photoluminescent and cathodoluminescent properties of ZnO thin films deposited by electron beam evaporation on the preparation conditions has been investigated. The films deposited at 200℃ to 400℃ showed c-axis orientation. The films showed two kind of emission with peaks at around 510nm or 540nm depending on the temperature and atomosphere at annealing. The film annealed at 800℃ in air showed CL luminance of about 60 cd/m^2 under excitation with 2kV, 400μA/cm^2. Moreover, it showed CL without charging-up under excitation even at 250V. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | electron beam evaporation / ZnO / thin film / phosphor / PL / CL |
Paper # | EID98-86 |
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Conference Information | |
Committee | EID |
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Conference Date | 1999/1/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | ZnO thin films prepared by vacuum evaporation |
Sub Title (in English) | |
Keyword(1) | electron beam evaporation |
Keyword(2) | ZnO |
Keyword(3) | thin film |
Keyword(4) | phosphor |
Keyword(5) | PL |
Keyword(6) | CL |
1st Author's Name | Aki Miyake |
1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
2nd Author's Name | Hiroko Kominami |
2nd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
3rd Author's Name | Toru Aoki |
3rd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
4th Author's Name | Hirokazu Tatsuoka |
4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
5th Author's Name | Hiroshi Kuwabara |
5th Author's Affiliation | Faculty of Engineering, Shizuoka University |
6th Author's Name | Yoichiro Nakanishi |
6th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University |
7th Author's Name | Yoshinori Hatanaka |
7th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University |
Date | 1999/1/21 |
Paper # | EID98-86 |
Volume (vol) | vol.98 |
Number (no) | 549 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |