| Presentation | 1999/1/21 Preparation of ZnO Thin Films by Halide VPE Naoyuki TAKAHASHI, Kazuhiko KAIYA, Kouji OMICHI, Takato NAKAMURA, Yoshimi MOMOSE, Hajime YAMAMOTO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Zinc oxide(ZnO)films were deposited on sapphire(0001)substrates by halide vapor phase epitaxy(VPE)using ZnCl_2 as a chloride source. Growth rate of the ZnO film increased with increasing growth temperature. The maximum growth rate was about 3 μm/h at 950℃. The X-ray diffractogram showed a typical pattern of epitaxially grown ZnO with a hexagonal structure, and a full width at half-maximum(FWHM)of 23.3 minutes was obtained in the X-ray diffraction profile. A strong band edge emission at 370.0 nm was observed at 20 K photoluminescence spectra. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / epitaxial / halide-VPE / ZnCl_2 / O_2 / sapphire(0001) / ultraviolet-emission |
| Paper # | EID98-85 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1999/1/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of ZnO Thin Films by Halide VPE |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | epitaxial |
| Keyword(3) | halide-VPE |
| Keyword(4) | ZnCl_2 |
| Keyword(5) | O_2 |
| Keyword(6) | sapphire(0001) |
| Keyword(7) | ultraviolet-emission |
| 1st Author's Name | Naoyuki TAKAHASHI |
| 1st Author's Affiliation | Department of Materials Science, Shizuoka University() |
| 2nd Author's Name | Kazuhiko KAIYA |
| 2nd Author's Affiliation | Department of Materials Science, Shizuoka University |
| 3rd Author's Name | Kouji OMICHI |
| 3rd Author's Affiliation | Department of Materials Science, Shizuoka University |
| 4th Author's Name | Takato NAKAMURA |
| 4th Author's Affiliation | Department of Materials Science, Shizuoka University |
| 5th Author's Name | Yoshimi MOMOSE |
| 5th Author's Affiliation | Research Institute of electronics, Shizuoka University |
| 6th Author's Name | Hajime YAMAMOTO |
| 6th Author's Affiliation | Department of electronics, Tokyo Engineering University |
| Date | 1999/1/21 |
| Paper # | EID98-85 |
| Volume (vol) | vol.98 |
| Number (no) | 549 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |