| Presentation | 1998/6/25 High Efficiency Machining Sysytem with Holographic Optical Element Tatsuya Yamamoto, Yoshio Saitoh, Yukio Satoh, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Excimer lasers are expected to be a useful tool for micro-processing of advance electric circuit board etc., because of its ability of short wavelength and short pulse. In these micro-processing, a mask imaging system is generally used. But in the conventional mask imaging system, most of laser power is reflected at the surface of the patterned mask, because of the slight open area ratio of the mask. It causes one of the large barrier to extend the market of an excimer laser for micro-processing. In order to overcome this problem we have developed a new laser machining system with H.O.E. The system is able to increase the mask transmission rate greatly by irradiating the laser power only around the mask open area using a H.O.E. As a result we have succeeded in increasing the net laser power at a work more than 10 times larger compared with conventional system. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | excimer laser / hologram / micro machining |
| Paper # | EID98-11 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1998/6/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High Efficiency Machining Sysytem with Holographic Optical Element |
| Sub Title (in English) | |
| Keyword(1) | excimer laser |
| Keyword(2) | hologram |
| Keyword(3) | micro machining |
| 1st Author's Name | Tatsuya Yamamoto |
| 1st Author's Affiliation | LASER & OPTICS TECH. DEPT. ADV. TECH. R&D CENTER MITSUBISHI ELECTRIC CORPORATION() |
| 2nd Author's Name | Yoshio Saitoh |
| 2nd Author's Affiliation | LASER & OPTICS TECH. DEPT. ADV. TECH. R&D CENTER MITSUBISHI ELECTRIC CORPORATION |
| 3rd Author's Name | Yukio Satoh |
| 3rd Author's Affiliation | LASER & OPTICS TECH. DEPT. ADV. TECH. R&D CENTER MITSUBISHI ELECTRIC CORPORATION |
| Date | 1998/6/25 |
| Paper # | EID98-11 |
| Volume (vol) | vol.98 |
| Number (no) | 151 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |