| Presentation | 1998/10/22 Study of the Thin HARP Film for Solid-state imagers Y. Takiguchi, Y. Ohkawa, K. Miyakawa, M. Kosugi, S. Suzuki, M. Kubota, T. Kato, K. Shidara, K. Tanioka, Park Wug-Dong, A. Kobayashi, T. Hirai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A HARP(High-gain Avalanche Rushing amorphous Photoconductor)film for use in a solid-state imager was studied. A thin HARP film must be developed because the available bias voltage of the film in a solid-state imager is restricted below 60 V, which is the endurance voltage of readout MOS transistors at present. We estimated that the suitable thickness of the film was 0.4μm. And by using the experimental tube, we confirmed an avalanche gain of four at a bias voltage of 60 V. No deterioration of the spectral response characteristics of an imager with the thin HARP film was observed, but it was found that the quantum efficiency was low at the green and red wavelengths. To increase the sensitivity of the thin 0.4-μm HARP film, we disigned a tellurium(Te)-doped HARP film by using the simulations of the quantum efficiency. These simulation showed that the sensitivity of the film could be more than doubled over conventional levels for green light. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | HARP / Avalanche multiplication / Spectral response / Overlay / Solid-state imager |
| Paper # | EID98-50 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1998/10/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of the Thin HARP Film for Solid-state imagers |
| Sub Title (in English) | |
| Keyword(1) | HARP |
| Keyword(2) | Avalanche multiplication |
| Keyword(3) | Spectral response |
| Keyword(4) | Overlay |
| Keyword(5) | Solid-state imager |
| 1st Author's Name | Y. Takiguchi |
| 1st Author's Affiliation | NHK Science and Technical Research Labs() |
| 2nd Author's Name | Y. Ohkawa |
| 2nd Author's Affiliation | NHK Science and Technical Research Labs |
| 3rd Author's Name | K. Miyakawa |
| 3rd Author's Affiliation | NHK Science and Technical Research Labs |
| 4th Author's Name | M. Kosugi |
| 4th Author's Affiliation | NHK Science and Technical Research Labs |
| 5th Author's Name | S. Suzuki |
| 5th Author's Affiliation | NHK Science and Technical Research Labs |
| 6th Author's Name | M. Kubota |
| 6th Author's Affiliation | NHK Science and Technical Research Labs |
| 7th Author's Name | T. Kato |
| 7th Author's Affiliation | NHK Science and Technical Research Labs |
| 8th Author's Name | K. Shidara |
| 8th Author's Affiliation | NHK Science and Technical Research Labs |
| 9th Author's Name | K. Tanioka |
| 9th Author's Affiliation | NHK Science and Technical Research Labs |
| 10th Author's Name | Park Wug-Dong |
| 10th Author's Affiliation | Dongyang University |
| 11th Author's Name | A. Kobayashi |
| 11th Author's Affiliation | Hamamatsu Photonics K.K. |
| 12th Author's Name | T. Hirai |
| 12th Author's Affiliation | Hamamatsu Photonics K.K. |
| Date | 1998/10/22 |
| Paper # | EID98-50 |
| Volume (vol) | vol.98 |
| Number (no) | 353 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |