Presentation | 1994/2/18 Bottom-Gate Poly-Si TFT Fabricated by Excimer laser Annealling Tatsuo Yoshioka, Mamoru Furuta, Tetsuya Kawamura, Yutaka Miyata, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Bottom-gate poly-Si TFTs have been successfully fabricated on a hard glass substrate using XeCl excimer laser annealing and non- mass-separated ion doping techniques.We used an a-Si:H film deposited by plasma enhanced chemical vapor deposition(PECVD)on SiN_xas a precursor film.The bottom-gate structure might allow us to use as many conventional a-Si TFT fabrication process as possible to realize poly-Si TFTS.By using excimer laser annealing and ion doping,we have obtained excellent TFTS,field effect mobility of 200 cm]2], V.s.Also we have demonstrated the threshold voltage control method using a channel doping technique. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Poly-Si / TFT / Bottom-Gate / Eximer / laser |
Paper # | EID93-134,ED93-188,SDM93-211 |
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Conference Information | |
Committee | EID |
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Conference Date | 1994/2/18(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Bottom-Gate Poly-Si TFT Fabricated by Excimer laser Annealling |
Sub Title (in English) | |
Keyword(1) | Poly-Si |
Keyword(2) | TFT |
Keyword(3) | Bottom-Gate |
Keyword(4) | Eximer |
Keyword(5) | laser |
1st Author's Name | Tatsuo Yoshioka |
1st Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD() |
2nd Author's Name | Mamoru Furuta |
2nd Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
3rd Author's Name | Tetsuya Kawamura |
3rd Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
4th Author's Name | Yutaka Miyata |
4th Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
Date | 1994/2/18 |
Paper # | EID93-134,ED93-188,SDM93-211 |
Volume (vol) | vol.93 |
Number (no) | 471 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |