| Presentation | 1994/2/18 Bottom-Gate Poly-Si TFT Fabricated by Excimer laser Annealling Tatsuo Yoshioka, Mamoru Furuta, Tetsuya Kawamura, Yutaka Miyata, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Bottom-gate poly-Si TFTs have been successfully fabricated on a hard glass substrate using XeCl excimer laser annealing and non- mass-separated ion doping techniques.We used an a-Si:H film deposited by plasma enhanced chemical vapor deposition(PECVD)on SiN_xas a precursor film.The bottom-gate structure might allow us to use as many conventional a-Si TFT fabrication process as possible to realize poly-Si TFTS.By using excimer laser annealing and ion doping,we have obtained excellent TFTS,field effect mobility of 200 cm]2], V.s.Also we have demonstrated the threshold voltage control method using a channel doping technique. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si / TFT / Bottom-Gate / Eximer / laser |
| Paper # | EID93-134,ED93-188,SDM93-211 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1994/2/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Bottom-Gate Poly-Si TFT Fabricated by Excimer laser Annealling |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si |
| Keyword(2) | TFT |
| Keyword(3) | Bottom-Gate |
| Keyword(4) | Eximer |
| Keyword(5) | laser |
| 1st Author's Name | Tatsuo Yoshioka |
| 1st Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD() |
| 2nd Author's Name | Mamoru Furuta |
| 2nd Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
| 3rd Author's Name | Tetsuya Kawamura |
| 3rd Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
| 4th Author's Name | Yutaka Miyata |
| 4th Author's Affiliation | LCD Development Center,Matsushita Electric Industrial Co.,LTD |
| Date | 1994/2/18 |
| Paper # | EID93-134,ED93-188,SDM93-211 |
| Volume (vol) | vol.93 |
| Number (no) | 471 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |