| Presentation | 1994/2/18 A TFT-LCD with peripheral poly-Si TFT circuits Nobutake Konishi, Takeshi Tanaka, Youmei Shinagawa, Kazuhiro Ogawa, Hiroaki Asuma, Kikuo Ono, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Inverted staggered poly-Si TFTs are fabricated by XeCl eximer laser annealing of plasma enhanced chemical vapor deposition a-Si: H films.The semiconductor layer of poly-Si TFTs is a multilayer of poly-Si and a-Si:H films.The channel direct contact structure improves the electrical characteristics resulting in mobility of 20cm^2, V・s.The maximum process temperature,carried out below 300℃ ,is compatible with conventional a-Si:H TFT process.The 2.3-inch a- Si:H TFT LCD with a switch matrix of poly-Si TFTs has good performance and reduces the number of signal driver ICs by half. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TFT / LCD / poly-Si / a-Si / eximer laser / mobility |
| Paper # | EID93-133,ED93-186,SDM93-210 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1994/2/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A TFT-LCD with peripheral poly-Si TFT circuits |
| Sub Title (in English) | |
| Keyword(1) | TFT |
| Keyword(2) | LCD |
| Keyword(3) | poly-Si |
| Keyword(4) | a-Si |
| Keyword(5) | eximer laser |
| Keyword(6) | mobility |
| 1st Author's Name | Nobutake Konishi |
| 1st Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd.() |
| 2nd Author's Name | Takeshi Tanaka |
| 2nd Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd. |
| 3rd Author's Name | Youmei Shinagawa |
| 3rd Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd. |
| 4th Author's Name | Kazuhiro Ogawa |
| 4th Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd. |
| 5th Author's Name | Hiroaki Asuma |
| 5th Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd. |
| 6th Author's Name | Kikuo Ono |
| 6th Author's Affiliation | Hitachi Research Laboratory,Hitachi Ltd. |
| Date | 1994/2/18 |
| Paper # | EID93-133,ED93-186,SDM93-210 |
| Volume (vol) | vol.93 |
| Number (no) | 471 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |