Presentation 1994/2/18
Glass substrate for low temperature poly-Si TFT-LCDs
Yasumasa Nakao, Manabu Nishizawa, Hideki Kushitani, Setsuro Ito,
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Abstract(in English) An alkali-free glass named AN690 was developed for the glass substrates of low temperature poly-Si TFT-LCDs.Low thermal deformation and shrinkage were the main criteria for AN690′s glass composition design. Properties of AN690 are presented and compared with Asahi′s comm ercial glasses for simple matrix(AS)and a-Si TFT(AN635)LCD′s appli cations. The comparison of the thermal properties indicates that AN690 exhibits a high thermal stability.The reason for such a behavior is attributed to a high strain point(700℃)which is100℃ higher tha n low temperature poly-Si TFT-LCD′s processing temperature. Hence AN690 is a good substrate for low temperature poly-Si TFT- LCDs.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Glass substrate / Low temperature poly-Si TFT-LCD / Alkaki-free glass / Thermal deformation / Thermal shrinkage
Paper # EID93-131,ED93-185,SDM93-208
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Committee EID
Conference Date 1994/2/18(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Glass substrate for low temperature poly-Si TFT-LCDs
Sub Title (in English)
Keyword(1) Glass substrate
Keyword(2) Low temperature poly-Si TFT-LCD
Keyword(3) Alkaki-free glass
Keyword(4) Thermal deformation
Keyword(5) Thermal shrinkage
1st Author's Name Yasumasa Nakao
1st Author's Affiliation Central Research Center, Asahi Glass Co.,Ltd.()
2nd Author's Name Manabu Nishizawa
2nd Author's Affiliation Central Research Center, Asahi Glass Co.,Ltd.
3rd Author's Name Hideki Kushitani
3rd Author's Affiliation Central Research Center, Asahi Glass Co.,Ltd.
4th Author's Name Setsuro Ito
4th Author's Affiliation Central Research Center, Asahi Glass Co.,Ltd.
Date 1994/2/18
Paper # EID93-131,ED93-185,SDM93-208
Volume (vol) vol.93
Number (no) 471
Page pp.pp.-
#Pages 5
Date of Issue