| Presentation | 1995/6/23 A 18.2-in.-Diagonal poly-Si TFT-LCD by Laser annealing Process Yoshirou Mikami, Yoshiharu Nagae, Akio Mimura, Yuji Mori, Kazuhiro Kuwabara, Eiji Kaneko, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A 18.2-in. -diagonal p-Si TFT-LCD with 960×517 color pixels has benn developed. For fabricating high performance poly-Si TFT's on a 450×350mm large glass substrate with good uniformity, the substrate-heating Laser annealing technology and the two-step laser irradiating method has been used. An high frequency Xe-Cl excimer Laser was employed. The first step and the second step of irradiation were carried out with intensity of around the threshould for re-crystallization and with intensity of re-crystallizing enough, respectivily. High-performance multi-gate TFT's with off current of under 10pA and μFE of 100cm^2/Vs were achieved. Finally, We have succeeded in the development of a 18.2-in. diagonal TFT-LCD for HDTV with excellent uniformity characteristics in TFT mobilities and off current. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | p-SiTFT / TFT-LCD / Laser annealing technology / Large Size Display / Flat Panel Display |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A 18.2-in.-Diagonal poly-Si TFT-LCD by Laser annealing Process |
| Sub Title (in English) | |
| Keyword(1) | p-SiTFT |
| Keyword(2) | TFT-LCD |
| Keyword(3) | Laser annealing technology |
| Keyword(4) | Large Size Display |
| Keyword(5) | Flat Panel Display |
| 1st Author's Name | Yoshirou Mikami |
| 1st Author's Affiliation | Giant Electronics Technology Corporation() |
| 2nd Author's Name | Yoshiharu Nagae |
| 2nd Author's Affiliation | Giant Electronics Technology Corporation |
| 3rd Author's Name | Akio Mimura |
| 3rd Author's Affiliation | Giant Electronics Technology Corporation |
| 4th Author's Name | Yuji Mori |
| 4th Author's Affiliation | Giant Electronics Technology Corporation |
| 5th Author's Name | Kazuhiro Kuwabara |
| 5th Author's Affiliation | Giant Electronics Technology Corporation |
| 6th Author's Name | Eiji Kaneko |
| 6th Author's Affiliation | Giant Electronics Technology Corporation |
| Date | 1995/6/23 |
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| Volume (vol) | vol.95 |
| Number (no) | 115 |
| Page | pp.pp.- |
| #Pages | 6 |
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