| Presentation | 1995/10/23 Post-annealing Effects on the Characteristics of Poly-Si TFT's Kwon-Young Choi, Yong-Sang Kim, Min-Koo Han, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The amorphous silicon films deposited by low pressure chemical vapor deposition are crystallized by the various annealing techniques including low-temperature furnace annealing, excimer laser annealing and two-step annealing. Two-step annealing, which is the combination of furnace annealing at 600 ℃ for 24 h and the sequential furnace annealing at 950℃/1h or the excimer laser annealing, is found to reduce the in-grain defects significantly without changing the grain boundary structure. As a consequence, the performance of the poly-Si thin film transistors (TFT's) produced by employing the two-step annealing has been improved remarkably if compared with those of one-step annealing. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si Thin Film Transistors / Two-step Annealing / Grain Boundary / In-grain Defects |
| Paper # | EID95-44 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Post-annealing Effects on the Characteristics of Poly-Si TFT's |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si Thin Film Transistors |
| Keyword(2) | Two-step Annealing |
| Keyword(3) | Grain Boundary |
| Keyword(4) | In-grain Defects |
| 1st Author's Name | Kwon-Young Choi |
| 1st Author's Affiliation | Dep't. of Electrical Eng., Seoul National University() |
| 2nd Author's Name | Yong-Sang Kim |
| 2nd Author's Affiliation | Dep't. of Electrical Eng., Myongji University |
| 3rd Author's Name | Min-Koo Han |
| 3rd Author's Affiliation | Dep't. of Electrical Eng., Seoul National University |
| Date | 1995/10/23 |
| Paper # | EID95-44 |
| Volume (vol) | vol.95 |
| Number (no) | 335 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |