| Presentation | 1998/3/6 A New Method to Fabricate Metal Tips for Scanning Probe Microscopy Y Shimada, T Yagi, T Ikeda, O Takamatsu, H Matsuda, K Takimoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We present a new method to fabricate sharp metal tips for scanning probe microscopy.The metal tip, which is deposited on a silicon mold, is attached by metal-to-metal bonding to a metal pad on a substrate, and peeled off the mold.By applying this method, a platinum tip with a radius curvature of less than 15nm was successfully fabricated.We succeeded to form a tip on a piezoresistive cantilever, and obtained high resolution topography and surface conductance images, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | scanning probe microscopy / metal tip / silicon mold |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1998/3/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A New Method to Fabricate Metal Tips for Scanning Probe Microscopy |
| Sub Title (in English) | |
| Keyword(1) | scanning probe microscopy |
| Keyword(2) | metal tip |
| Keyword(3) | silicon mold |
| 1st Author's Name | Y Shimada |
| 1st Author's Affiliation | Canon Research Center, Canon Inc.() |
| 2nd Author's Name | T Yagi |
| 2nd Author's Affiliation | Canon Research Center, Canon Inc. |
| 3rd Author's Name | T Ikeda |
| 3rd Author's Affiliation | Canon Research Center, Canon Inc. |
| 4th Author's Name | O Takamatsu |
| 4th Author's Affiliation | Canon Research Center, Canon Inc. |
| 5th Author's Name | H Matsuda |
| 5th Author's Affiliation | Canon Research Center, Canon Inc. |
| 6th Author's Name | K Takimoto |
| 6th Author's Affiliation | Canon Research Center, Canon Inc. |
| Date | 1998/3/6 |
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| Volume (vol) | vol.97 |
| Number (no) | 588 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |