Presentation 1997/6/10
A High Voltage MOS Transistor for Solid-state Imager with Avalanche Multiplier Film
Hiroshi Ohtake, Miho Nakayama, Masahito Yamauchi, Toshifumi Tajima, Toshiyuki Watabe, Yoshirou Takiguchi, Yuichi Ishiguro, Tetsuya Hayashida, Toshihide Watanabe, Masahide Abe,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We studied a MOSFET which suits with a readout transistor on a solid-state imager in which MOS scanner is combined with an avalanche photoconversion layer. The MOSFET requires high endurance voltage because high voltage is applied between the scanner and the photoconversion layer to get high multiplication gain using avalanche phenomenon. In this paper, a new MOSFET structure, which can increase the endurance voltage by attaching an electric field relaxation layer to the drain contact of the MOSFET, is described. The devide parameters for fine readout operation were decided by calculations using a process-device simulator. The electric field relaxation layer was confirmed to work effectively because endurance voltage of 60V was obtained on fabricated test devices.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Image sensor / Avalanche photoconversion film / High voltage MOSFET
Paper # EID97-17
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Committee EID
Conference Date 1997/6/10(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A High Voltage MOS Transistor for Solid-state Imager with Avalanche Multiplier Film
Sub Title (in English)
Keyword(1) Image sensor
Keyword(2) Avalanche photoconversion film
Keyword(3) High voltage MOSFET
1st Author's Name Hiroshi Ohtake
1st Author's Affiliation NHK Science and Technical Research Laboratories()
2nd Author's Name Miho Nakayama
2nd Author's Affiliation NHK Science and Technical Research Laboratories
3rd Author's Name Masahito Yamauchi
3rd Author's Affiliation NHK Science and Technical Research Laboratories
4th Author's Name Toshifumi Tajima
4th Author's Affiliation NHK Science and Technical Research Laboratories
5th Author's Name Toshiyuki Watabe
5th Author's Affiliation NHK Science and Technical Research Laboratories
6th Author's Name Yoshirou Takiguchi
6th Author's Affiliation NHK Science and Technical Research Laboratories
7th Author's Name Yuichi Ishiguro
7th Author's Affiliation NHK Science and Technical Research Laboratories
8th Author's Name Tetsuya Hayashida
8th Author's Affiliation NHK Science and Technical Research Laboratories
9th Author's Name Toshihide Watanabe
9th Author's Affiliation NHK Science and Technical Research Laboratories
10th Author's Name Masahide Abe
10th Author's Affiliation NHK Science and Technical Research Laboratories
Date 1997/6/10
Paper # EID97-17
Volume (vol) vol.97
Number (no) 90
Page pp.pp.-
#Pages 7
Date of Issue