| Presentation | 1997/6/10 A multiple imaging system using holographic optical element for laser machining Tomohiro Sasagawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a novel excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The HOFs that we used were computer generated phase holograms. We calculated the HOE by with three-step optimization using a direct binary search algorithm. The optimized HOE pattern was 4-level, and the matrix size was 1024×1024 with 1 micron pixels. With the use of this HOE, the 95 holes whose diameter was 0.1 mm were drilled in a 10×10 mm area. The energy availability was 19.4%. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diffractive Optical Element / Holographic Optical Element / Excimer Laser Ablation |
| Paper # | EID97-12 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1997/6/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A multiple imaging system using holographic optical element for laser machining |
| Sub Title (in English) | |
| Keyword(1) | Diffractive Optical Element |
| Keyword(2) | Holographic Optical Element |
| Keyword(3) | Excimer Laser Ablation |
| 1st Author's Name | Tomohiro Sasagawa |
| 1st Author's Affiliation | MITSUBISHI Electric Corp. Advanced Technology R&D Center() |
| Date | 1997/6/10 |
| Paper # | EID97-12 |
| Volume (vol) | vol.97 |
| Number (no) | 90 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |