| Presentation | 1997/2/14 APPLICATIONS OF CHEMICAL-MECHANICAL-POLISHING PROCESS TO SILICON FIELD EMITTER ARRAY Jin Ho Lee, Yoon-Ho Song, Sung Weon Kang, Byoung Gon Yu, Kyoung Ik Cho, Sang Yun Lee, Hyung Joun Yoo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated and characterized silicon field emitter arrays by Chemical-Mechanicai-Polishil1g (CMP) process for a clearly cutted gate electrode that was exactly aligned to the emitter. A very high etching selectivity (> 200:1) between the gate electrode and the dielectric was used for preventing the tip from etching off during the CMP. Furthermore, focusing electrodes were also fabricated by the CMP process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | EID96-143 |
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| Committee | EID |
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| Conference Date | 1997/2/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | APPLICATIONS OF CHEMICAL-MECHANICAL-POLISHING PROCESS TO SILICON FIELD EMITTER ARRAY |
| Sub Title (in English) | |
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| 1st Author's Name | Jin Ho Lee |
| 1st Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute() |
| 2nd Author's Name | Yoon-Ho Song |
| 2nd Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute |
| 3rd Author's Name | Sung Weon Kang |
| 3rd Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute |
| 4th Author's Name | Byoung Gon Yu |
| 4th Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute |
| 5th Author's Name | Kyoung Ik Cho |
| 5th Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute |
| 6th Author's Name | Sang Yun Lee |
| 6th Author's Affiliation | Department of Physics, Kyungpook National University |
| 7th Author's Name | Hyung Joun Yoo |
| 7th Author's Affiliation | Semiconductor Technology Div., Electronics and Telecommunications Research Institute |
| Date | 1997/2/14 |
| Paper # | EID96-143 |
| Volume (vol) | vol.96 |
| Number (no) | 518 |
| Page | pp.pp.- |
| #Pages | 2 |
| Date of Issue | |