| Presentation | 1997/2/14 POLYCRYSTALLINE SILICON FIELD EMITTER ARRAYS WITH A GATED STRUCTURE Yoon-Ho Song, Jin Ho Lee, Sung Weon Kang, Byoung-Gon Yu, Kyoung Ik Cho, Hyung Joun Yoo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gated polycrystalline silicon field emitter arrays have been fabricated by using a combined dry and Wet etching technique for tip formation and a photoresist etch-back process for gate opening. The fabricated emitter with a tip radius of ～100Å showed electron emissions at a gate voltage of 45 V, comparable to single crystalline silicon tips processed with a sharpening oxidation. The developed method can be applicable to glass-based field emitter displays with semiconductor IC techno1ogies. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | EID96-142 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1997/2/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | POLYCRYSTALLINE SILICON FIELD EMITTER ARRAYS WITH A GATED STRUCTURE |
| Sub Title (in English) | |
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| 1st Author's Name | Yoon-Ho Song |
| 1st Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute() |
| 2nd Author's Name | Jin Ho Lee |
| 2nd Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute |
| 3rd Author's Name | Sung Weon Kang |
| 3rd Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute |
| 4th Author's Name | Byoung-Gon Yu |
| 4th Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute |
| 5th Author's Name | Kyoung Ik Cho |
| 5th Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute |
| 6th Author's Name | Hyung Joun Yoo |
| 6th Author's Affiliation | Semiconductor Division, Electronics and Telecommunications Research Institute |
| Date | 1997/2/14 |
| Paper # | EID96-142 |
| Volume (vol) | vol.96 |
| Number (no) | 518 |
| Page | pp.pp.- |
| #Pages | 2 |
| Date of Issue | |