Presentation 1997/2/13
NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD
Chunrya Wu, Jianjun Zhang, Ying Zhao, Zhonglin Sun, H. Yale Sun, Sheau-Sheng Chen,
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Abstract(in English) We ropose a novel mixed dual bean laser crystallization method, where two different pulse lasers with different wavelength successively irrdiate on Si fi1m. Thermodynamic computer model of 1aser annealing is used to analyze the solidification characteristics of Si film annealed by the novel method. The simulation results demonstrate that the novel method is a promising one to reduce solidification velocity effectively.
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Keyword(in English) mixed dual beam / laser annealing / sodification velocity / numerical simulation
Paper # EID96-119
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Conference Date 1997/2/13(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD
Sub Title (in English)
Keyword(1) mixed dual beam
Keyword(2) laser annealing
Keyword(3) sodification velocity
Keyword(4) numerical simulation
1st Author's Name Chunrya Wu
1st Author's Affiliation Institute of photoelectronics, Nankai Univ.()
2nd Author's Name Jianjun Zhang
2nd Author's Affiliation Institute of photoelectronics, Nankai Univ.
3rd Author's Name Ying Zhao
3rd Author's Affiliation Institute of photoelectronics, Nankai Univ.
4th Author's Name Zhonglin Sun
4th Author's Affiliation Institute of photoelectronics, Nankai Univ.
5th Author's Name H. Yale Sun
5th Author's Affiliation XMR Inc.
6th Author's Name Sheau-Sheng Chen
6th Author's Affiliation XMR Inc.
Date 1997/2/13
Paper # EID96-119
Volume (vol) vol.96
Number (no) 517
Page pp.pp.-
#Pages 3
Date of Issue