Presentation | 1997/2/13 NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD Chunrya Wu, Jianjun Zhang, Ying Zhao, Zhonglin Sun, H. Yale Sun, Sheau-Sheng Chen, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We ropose a novel mixed dual bean laser crystallization method, where two different pulse lasers with different wavelength successively irrdiate on Si fi1m. Thermodynamic computer model of 1aser annealing is used to analyze the solidification characteristics of Si film annealed by the novel method. The simulation results demonstrate that the novel method is a promising one to reduce solidification velocity effectively. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | mixed dual beam / laser annealing / sodification velocity / numerical simulation |
Paper # | EID96-119 |
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Committee | EID |
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Conference Date | 1997/2/13(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
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Topics (in English) | |
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Registration To | Electronic Information Displays (EID) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD |
Sub Title (in English) | |
Keyword(1) | mixed dual beam |
Keyword(2) | laser annealing |
Keyword(3) | sodification velocity |
Keyword(4) | numerical simulation |
1st Author's Name | Chunrya Wu |
1st Author's Affiliation | Institute of photoelectronics, Nankai Univ.() |
2nd Author's Name | Jianjun Zhang |
2nd Author's Affiliation | Institute of photoelectronics, Nankai Univ. |
3rd Author's Name | Ying Zhao |
3rd Author's Affiliation | Institute of photoelectronics, Nankai Univ. |
4th Author's Name | Zhonglin Sun |
4th Author's Affiliation | Institute of photoelectronics, Nankai Univ. |
5th Author's Name | H. Yale Sun |
5th Author's Affiliation | XMR Inc. |
6th Author's Name | Sheau-Sheng Chen |
6th Author's Affiliation | XMR Inc. |
Date | 1997/2/13 |
Paper # | EID96-119 |
Volume (vol) | vol.96 |
Number (no) | 517 |
Page | pp.pp.- |
#Pages | 3 |
Date of Issue |