| Presentation | 1997/2/13 FABRICATION OF POLY-SI TFT ON THE GLASS SUBSTRATE BY METAL-INDUCED LATERAL CRYSTALLIZATION Tae-Kyung Kim, Byung-Il Lee, Kwang-Ho Kim, Jim-Wook Shin, Pyung-Soo Ahn, Won-Cheol Jeong, Seung-Ki Joo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Metal contamination free Poly-Si TFT's could be fabricated on the glass substrate at 450℃ by Metal Iriduced Lateral Crystallization (MILC) method. the channel area was laterally crystallized from the source and drain areas, where the thin fi1m of nickel was deposited in a self aligned manner. Electriial activation of the source and drain could be achieved by annealing at 450℃ after the ion mass doping of phosphorus. The N-channel TFTs showed the mobility of ～53cm^2/Vs, and the on/off current ratio was higher than 10^6 |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si TFT's / Metal Induced Lateral Crystallization / glass substrate / ion mass doping |
| Paper # | EID96-118 |
| Date of Issue |
| Conference Information | |
| Committee | EID |
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| Conference Date | 1997/2/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | FABRICATION OF POLY-SI TFT ON THE GLASS SUBSTRATE BY METAL-INDUCED LATERAL CRYSTALLIZATION |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si TFT's |
| Keyword(2) | Metal Induced Lateral Crystallization |
| Keyword(3) | glass substrate |
| Keyword(4) | ion mass doping |
| 1st Author's Name | Tae-Kyung Kim |
| 1st Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity() |
| 2nd Author's Name | Byung-Il Lee |
| 2nd Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| 3rd Author's Name | Kwang-Ho Kim |
| 3rd Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| 4th Author's Name | Jim-Wook Shin |
| 4th Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| 5th Author's Name | Pyung-Soo Ahn |
| 5th Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| 6th Author's Name | Won-Cheol Jeong |
| 6th Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| 7th Author's Name | Seung-Ki Joo |
| 7th Author's Affiliation | Division of Materials Science and Engineering, Seoul National Uriversity |
| Date | 1997/2/13 |
| Paper # | EID96-118 |
| Volume (vol) | vol.96 |
| Number (no) | 517 |
| Page | pp.pp.- |
| #Pages | 3 |
| Date of Issue | |