Presentation | 1997/2/13 New Poly-Silicon TFT Partially Crystallized by Excimer Laser Irradiation through ITO Gate Jae-Hong Jeon, Cheol-Min Park, Hong-Seok Choi, Kwon-Young Choi, Min-Koo Han, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We propose the new poly-Si TFT structure which reduces the leakage current effectively employing highly resistive a-Si region in the channel. This new device has partially crystallized active layer, where both edges of channel region adjacent to source and drain are not crystallized and remain a-Si. In the fabrication of the proposed device, there are not additional photo masking steps and misalign problem. Another advalltage of the proposed device is increase of aperture ratio adopting the transparent |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ITO gate |
Paper # | EID96-104 |
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Committee | EID |
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Conference Date | 1997/2/13(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | New Poly-Silicon TFT Partially Crystallized by Excimer Laser Irradiation through ITO Gate |
Sub Title (in English) | |
Keyword(1) | ITO gate |
1st Author's Name | Jae-Hong Jeon |
1st Author's Affiliation | School of Electrical Engineering, Seoul National University() |
2nd Author's Name | Cheol-Min Park |
2nd Author's Affiliation | School of Electrical Engineering, Seoul National University |
3rd Author's Name | Hong-Seok Choi |
3rd Author's Affiliation | School of Electrical Engineering, Seoul National University |
4th Author's Name | Kwon-Young Choi |
4th Author's Affiliation | School of Electrical Engineering, Seoul National University |
5th Author's Name | Min-Koo Han |
5th Author's Affiliation | School of Electrical Engineering, Seoul National University |
Date | 1997/2/13 |
Paper # | EID96-104 |
Volume (vol) | vol.96 |
Number (no) | 517 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |