| Presentation | 2001/10/11 FDTD Analysis of Wire Antenna Used for Large Area Plasma Production Katsuaki Tamashiro, Hiroyasu Sato, Kunio Sawaya, Tomoko Takagi, Masashi Ueda, Yoshimi Watabe, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to obtain large area of amorphous Silicon deposition used for LCD and solar cells, FDTD(Finite Difference Time Domain) analysis of folded monopole antenna and the array antenna in plasma is performed. Plasma parameters such as the plasma frequency, collision frequency and the thickness of ion sheath surrounding antenna conductor are estimated by comparing the calculated input impedance of the folded monopole antenna with experimental results. It is noted that effect of the ion sheath is important to obtain accurate numerical results. The electric field distribution produced by the electric field distribution produced by the folded monopole array antenna is also calculated and compared with the distribution of the deposition rate, showing that the electric field distribution agree qualitatively with deposition rate. It is concluded that the co-phase feeding can not yield uniform distribution of electric and deposition rate, whereas the phase-controlled feeding can make uniform distribution. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Wire antenna / FDTD / Plasma / Ion shcath / Array antenna / Phase-controlled feed |
| Paper # | A・P2001-82,RCS2001-121 |
| Date of Issue |
| Conference Information | |
| Committee | AP |
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| Conference Date | 2001/10/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Antennas and Propagation (A・P) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | FDTD Analysis of Wire Antenna Used for Large Area Plasma Production |
| Sub Title (in English) | |
| Keyword(1) | Wire antenna |
| Keyword(2) | FDTD |
| Keyword(3) | Plasma |
| Keyword(4) | Ion shcath |
| Keyword(5) | Array antenna |
| Keyword(6) | Phase-controlled feed |
| 1st Author's Name | Katsuaki Tamashiro |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Hiroyasu Sato |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Kunio Sawaya |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Tomoko Takagi |
| 4th Author's Affiliation | ANELVA Corporation |
| 5th Author's Name | Masashi Ueda |
| 5th Author's Affiliation | ANELVA Corporation |
| 6th Author's Name | Yoshimi Watabe |
| 6th Author's Affiliation | ANELVA Corporation |
| Date | 2001/10/11 |
| Paper # | A・P2001-82,RCS2001-121 |
| Volume (vol) | vol.101 |
| Number (no) | 366 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |