| Presentation | 1995/10/20 Calculation of Two-dimensional Optical Image by Diffraction Theory Masaki HASHIMOTO, Masayuki OODO, Makoto ANDO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In optical lithography used in the process of producing a semiconductor integrated circuit, various methods to get a high integration have been developed, such as a circular illumination as a light source or a phaseshifting mask to avoid an effect of adjacent circuit patterns. Essentially, a distortion of the image is thought to come from diffracted rays from mask edges when desired circuit patterns get smaller. Thus we introduced a Modified Edge Representation, an electromagnetic diffraction theory used in an antenna engineering, into a ray tracing for diffracted rays from a light source to an image. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | optical lithography / electromagnetic diffraction theory / Modified Edge Representation / ray tracing |
| Paper # | A-P95-68,RCS95-93 |
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| Conference Information | |
| Committee | AP |
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| Conference Date | 1995/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Antennas and Propagation (A・P) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Calculation of Two-dimensional Optical Image by Diffraction Theory |
| Sub Title (in English) | |
| Keyword(1) | optical lithography |
| Keyword(2) | electromagnetic diffraction theory |
| Keyword(3) | Modified Edge Representation |
| Keyword(4) | ray tracing |
| 1st Author's Name | Masaki HASHIMOTO |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering Faculty of Engineering, Tokyo Institute of Technology() |
| 2nd Author's Name | Masayuki OODO |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering Faculty of Engineering, Tokyo Institute of Technology |
| 3rd Author's Name | Makoto ANDO |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering Faculty of Engineering, Tokyo Institute of Technology |
| Date | 1995/10/20 |
| Paper # | A-P95-68,RCS95-93 |
| Volume (vol) | vol.95 |
| Number (no) | 311 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |